International Business Machines Corporation

Gerhard Kaus

Holger Hinkel

Georg Kraus

Ulrich Kunzel

Johann Greschner

Harald Bohlen

Gerhard E Schmid

Werner Kulcke

Ulrich Kuenzel

Jurgen Kempf

Joachim H Keyser

Volker Heinrich

Erhard Max

Friedrich Ertingshausen

Michael Glatzel

Annelie Monnich

Reinhold Muehl

Manfred Schrader

Hans-Georg Nauth

For making rails in workpieces for magnetic head sliders for sensors of magnetizable media, anodic oxidation of highly pure aluminum substrates is applied. For that purpose, the respective surface of the substrates is covered with a mask cover which leaves uncovered the zones in the substrate surface area which are intended for the forming of rails. By means of anodic oxidation of the aluminum in the exposed regions, rail layer regions of oxide are formed which after the removal of the mask cover can themselves be used as an etching mask in order to provide a recessed region between two respective rails by means of chemical wet etching.

Method of making magnetic head sliders

The magnetic disc comprises a magnetizable layer (1) to which an adhesion promoting layer (4) and thereto a lubricant film (5) are applied. Onto the substrate of the magnetic head (2) an adhesion reducing layer (9) is deposited. The apparatus can also show only one adhesion-influencing layer. The layers (4) and (9) are formed by the reaction of a sililating agent with reactive groups on the surface of the magnetizable layer (1), or of the substrate of the magnetic head (2), respectively. The sililating agents used differ in their terminal groups of which one category produce van der Waals bonds to the lubricant molecules, and the other is chemically indifferent relative to the lubricant molecules. The two layers (4) and (9) are made e.g. by the spin-coating of a solution of the sililating agent, and subsequent drying. The apparatus ensures a homogeneous coating of the magnetizable layer (1) with lubricant, and it prevents the pick-up of lubricant by the substrate of the magnetic head (2).

Apparatus comprising a lubricant-coated magnetic disc and a magnetic

A magnetic head slider consisting of a mixed ceramic made of aluminum oxide/titanium carbide has on its sliding side adjacent a magnetic record carrier a thin layer from which the titanium carbide component has been removed. The titanium carbide component preferably is removed by preferential reactive ion etching in a CF.sub.4 plasma. The magnetic head slider with its sliding surface thus modified exhibits greatly improved sliding properties compared with sliders of the same material having a non-modified sliding surface.

Magnetic head slider of ceramic material

Two electrical components 1 and 2 containing electric conductor lines 3 and 4 are interconnected in that one component 2 comprises silicon contact fingers 5 and a back part 6 made of silicon and carrying the fingers 5. Fingers 5 and back part 6 preferably represent an integer component of an integrated circuit provided on a monocrystalline substrate and to be connected to other electrical components. Fingers 5 and back part 6 are preferably made in accordance with micromechanical silicon semiconductor technology.

Contact device for releasably connecting electrical components

A plasma reactor comprises a reaction chamber having two plate-shaped electrodes arranged parallel to and above each other, whereby the substrates are supported on the lower electrode and this electrode is additionally provided with a center opening (5) through which gas is fed into the electrode space or which is evacuated from it, and where (a) the upper electrode is connected to a high frequency AC or RF voltage and (b) which has no electrode material in the regions opposite the substrates and (c) where their position and shape are determined by the substrates on the lower electrode, causing the electric field in the electrode space to be selectively weakened at at least above the substrates.

Plasma reactor for etching and coating substrates

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Moetzingen, Germany

Gerhard Kaus