Leybold Aktiengesellschaft

Beybold Systems Gmbh

Gerhard Joos

Manfred Schuhmacher

Andreas Sauer

Johannes Kunz

Helmut Schilling

A gate valve (,) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (,) of two chamber walls (,) that are provided between two vacuum chambers (,) and aligned with one another. To this end, it has two valve plates (,), which are a component of a slider (,), which is situated so that it can move with play from a position clearing the passage openings (,) to a position which closes the passage openings (,). To move the valve plates (,) to the closing setting against the passage openings (,) on the slider (,), at least one lifting element (,), which is acted on by pressure, is provided.

Gate valve

Cathode sputtering apparatus includes a target, a cooling channel, and a flexible diaphragm therebetween. The target is fixed to a base independently of the diaphragm, so that the target can be replaced with disturbing the cooling channel. In a preferred embodiment, the diaphragm and the target are fixed by respective sets of cleats retained by screws received from respective opposite directions.

Growing community of inventors

Niedernberg, Germany

Gerhard Joos