Leica Microsystems Semiconductor Gmbh

Kla-tencor Mie Gmbh

Gerhard Hoppen

Lambert Danner

Franz Cemic

Albert Kreh

Henning Backhauss

Wolfgang Vollrath

Roland Hedrich

Kurt Hahn

Christof Krampe-Zadler

Hermann Bittner

Alexander Büttner

An apparatus () for the optical inspection of wafers is disclosed, which comprises an assembly unit () which carries optical elements () of at least one illumination path () for a bright field illumination and optical elements () of at least one illumination path () for a dark field illumination. The assembly unit () furthermore carries plural optical elements () of at least one detection path (). An imaging optical element () of the at least one illumination path () for the bright field illumination (), imaging optical elements () of the at least one illumination path for the dark field illumination, and imaging optical elements () of the at least one detection path () are designed in such a way that all illumination paths () and all detection paths () are telecentric.

Apparatus for the optical inspection of wafers

A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.

Illumination device, and coordinate measuring instrument having an illumination device

A DUV-capable dry objective for microscopes comprises lens groups made of quartz glass, fluorite, and in some cases also lithium fluoride. It possesses a DUV focus for a DUV wavelength region &#x3bb;&#xb1;&#x394;&#x3bb;, where &#x394;&#x3bb;=8 nm, and additionally a parfocal IR focus for an IR wavelength &#x3bb;, where 760 nm&#x2267;&#x3bb;&#x2267;920 nm. For that purpose, the penultimate element is of concave configuration on both sides, and its object-side outer radius is much smaller than its image-side outer radius. The DUV objective is IR autofocus-capable.

DUV-capable microscope objective with parfocal IR focus

An inspection microscope () having a light source () that emits light of a first wavelength below 400 nm for illumination of a specimen () to be inspected, and having an objective () that is composed of multiple optical components and has a numerical aperture and a focal length, and having a tube optical system () and an autofocus device () that directs light of a second wavelength onto the specimen (), is disclosed. The inspection microscope () is characterized by the objective (), which has an optical correction that eliminates the longitudinal chromatic aberrations with respect to the first and the second wavelength and whose optical components are assembled in cement-free fashion, the second wavelength being greater than 400 nm.

Inspection microscope and objective for an inspection microscope

An illumination device according to the present invention comprises a light source (), an optical fiber bundle (), a coupling-in optical system () before and a coupling-out optical system () after the fiber bundle (), and an illuminating optical system (). A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system () advantageously comprises a micro-honeycomb condenser () and a lens member () which superimpose the exit opening of the fiber bundle () in an intermediate image plane () to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage () for receiving a substrate with a feature () that is to be measured, an illumination system with a light source (), an optical fiber bundle (), a coupling-in optical system (), a coupling-out optical system (), an illuminating optical system () for illuminating an image field on the substrate, and a detector device () for determining the position of the feature. A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field.

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Wetzlar, Germany

Gerhard Hoppen