Carl Zeiss Jena Gmbh

Gerhard Doering

Thomas Hartmann

Dirk Muehlhoff

Stefan Schmidt

Matthias John

Guenter Berthel

Guenther Rudolph

Rolf-Gero Rau

In a method for electronic image rectification in pixel-by-pixel scanning of a substrate by a bundled electromagnetic beam, the pixels are read out one after the other in readout intervals of constant predetermined duration. In order to improve image quality, the deviation between a reference scanning movement and an actual scanning movement carried out on the reference substrate is initially determined in a calibration process, for example, by a reference substrate with a known geometric surface structure. Depending on this deviation, a delay interval is determined for a pixel and the start of the readout interval of this pixel or of the subsequent pixel is delayed by this delay interval. The information about the delay interval is stored. In an analysis process for examining a substrate, the stored information about the delay interval is accessed for the pixel, and the delay interval is added before or after the readout interval.

Method for electronic image rectification in laser scanner devices

A method and an arrangement for detecting the position of the plane XY of an object, which plane XY is to be scanned, and for its positioning in the focal plane X&prime;Y&prime; of a laser scanner, preferably for a laser scanning microscope. According to the disclosure, it is provided in a method of the type described above that, after a rough orientation of the object carried out by placing on an object holder, a laser beam is directed successively in time to at least three different points P , P . . . P located in the scan plane XY of the object and, in doing so, each of the reflections proceeding from the points P , P . . . P is imaged on a position-sensitive detector, an actual position value is determined at the detector for each reflection and is compared with a stored reference position value, adjustment commands for changing the inclination of the object holder are obtained from the deviations of the actual position values from the reference position values, and the inclination of the object holder is changed on the basis of these adjustment commands until points P , P . . . P are located in the focal plane X&prime;Y&prime; of the laser scanner.

Method and array for detecting the position of a plane scanned with a laser scanner

A microscope is disclosed with a stage which is adjustable in coordinates X, Y and/or Z, with a drive for stage adjustment and with a control circuit for presetting different adjusting speeds. In a microscope of the type mentioned above, a device is provided for showing the given adjusting speed during the adjustment of the stage in at least one of coordinates X, Y, Z. Therefore, it is advantageously possible during the adjustment and/or programming of the microscope to visually perceive the adjusting speed or to display speed gradations which are not otherwise detectable in the eyepiece.

Microscope with table device

Growing community of inventors

Schloeben, Germany

Gerhard Doering