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Carl Zeiss Smt Gmbh

Tally Computer Drucker Gmbh

Gerhard Beurer

Toralf Gruner

Gerhard Uwe Schmidt

Markus Hauf

Joachim Hartjes

Johann Stempfle

Thomas Franke

A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.

Method and device for determining the heating state of an optical element in an optical system for microlithography

A droplet generator for microdroplets (), in particular a nozzle head for inkjet printers, having groups of piezo electrically actuated bending converters () disposed in a casing (), wherein the bending converters () are disposed at a distance from each other and are guided in recesses separated by wall thicknesses, wherein liquid longitudinal channels () run below the flexible fingers () and having a liquid chamber () with a nozzle (), can maintain a high liquid flow, in the case of sufficiently thick chamber walls, wherein the chamber walls do not allow a deformation to occur having in each case an edge bead () run around an opening () of the liquid chamber (), wherein the edge bead () serves to limit a stroke of a respective one of the flexible fingers () and wherein a shaft () having at least the width of the flexible finger () and the height level of the base plate () follows the opening ().

Droplet generator for microdroplets, in particular nozzle head for inkjet printer

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Ulm, Germany

Gerhard Beurer