Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh

Lambda Physik Forschungs-und Entwicklungs-gesellschaft Mbh

Lambda-physik Forschungs-und Entwicklungs Gmbh

Gerd Steinfuhrer

Frank Voss

Dirk Basting

An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).

Apparatus for purifying laser gas

An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).

In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.

Laser gas purifying apparatus

An ignitor for a preionizing means of an excimer laser has an electrically conductive core which projects into the gas space of the laser and which is surrounded by a jacket of a fluoroplastic. The jacket is brought into sealing engagement with the wall of the laser gas space by means of a pressure sleeve via mating conical surfaces.

Ignitor for the preionization of a gas-discharge laser

A preionization means for a gas-discharge laser, such as an excimer laser, comprises a stirrup member 26 and a preionization strip 20 secured thereto. To obtain the longest possible life of the laser with economical material use the preionization strip 20 is made from a different material from the stirrup member 26.

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Bovenden, Germany

Gerd Steinfuhrer