Grenzebach Maschinenbau Gmbh

Applied Materials Gmbh & Co Kg

Applied Materials, Inc.

Gerd Kleideiter

Michael Geisler

Anton Zmelty

Joerg Fiukowski

Olaf Gawer

Manfred Stephan Ruske

Matthias List

Sven Schramm

Udo Schreiber

Armin Reus

Thomas Krisch

Jörg Fiukowski

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations with the following features: a) a pair of cathodes arranged in a common process chamber and consisting of a first cathode body and a second cathode body is supplied with direct current by means of a common power supply, wherein, before entering the process chamber, the direct current is converted into a series of pulses comprising alternating positive and negative pulses with interpulse periods in between, b) an arrangement for controlling the length of the individual pulses and the duration of the respective interpulse periods.

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations

Disclosed are an apparatus and a method for saving energy while increasing the conveying speed in vacuum coating plants consisting of a series of sputtering segments () and gas separation segments () along with a continuous substrate plane (). Said apparatus has the following features: a) each of the sputtering segments () consists of a tank tub () inside which a conveying device () is located; the flange () of the tank is positioned in the immediate vicinity above the substrate plane (); a cathode bearing block (), along with targets () and gas inlet ducts (), is located in the tank cover () in the immediate vicinity of the substrate together with splash guards (); b) in the region of the substrate plane (), the gas separation segments () are provided with a tunnel cover () that extends along the entire length of the gas separation segment (); c) sputtering segments () and/or gas separation segments () are evacuated using one or more vacuum pumps (), and the air pumped in said process is trapped in an air reservoir () having an adjustable volume.

Method and apparatus for saving energy while increasing the conveying speed in vacuum coating plants

The invention relates to a silver low-E coating for glass which is temperable and can be applied by means of sputter processes onto the glass. The individual layers of the coating are cost-effective standard materials. One embodiment of the invention for example is comprised of a glass substrate, an SiNlayer disposed thereon of a thickness of approximately 15 nm, a TiOlayer of 15 nm thickness on the SiNlayer, a 12.5 nm thick Ag layer on the TiOlayer, a NiCrOlayer of approximately 5 nm thickness on the Ag layer and a terminating 45 nm thick SiNlayer.

Temperable glass coating

The invention relates to a coating for temperable substrates, in particular of glass panes. This coating comprises for example directly on the substrate an SiNlayer, thereon a CrN layer, thereon a TiOlayer and lastly an SiNlayer.

Glass coating

The invention relates to a glass coating and a method for the production of this glass coating. The glass coating comprises a first layer of ZnO and a second layer of Ag disposed thereon. Before the Ag layer is applied onto the ZnO layer, the latter is irradiated with ions.

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Ahaus, Germany

Gerd Kleideiter