Leybold Systems Gmbh

Leybold Optics Gmbh

Gerd Ickes

Ulrich Patz

In a vacuum treatment apparatus for deposition of thin layers on shell-shaped substrates ( &prime;, . . . ) with a plurality of treatment stations ( ) and airlock stations ( ) held by an otherwise closed stationary circular cylindrical vacuum chamber wall ( ) and a with rotatably arranged inner wall cylinder ( ) which holds the treatment stations ( through ) and which inner wall is enclosed by the vacuum chamber wall ( ) and in which vacuum chamber wall openings ( ) are provided, which openings are capable of overlapping the substrate chambers ( through ) and through which openings the treatment agents can act upon the substrates ( &prime;), and with an outer wall ( &prime;) enclosing the vacuum chamber wall, and in which apparatus there are provided two airlock stations ( ) which are located diametrically opposite each other and tangentially to the outer wall of the vacuum chamber ( ), and to each of these two airlock stations ( ) there is assigned a substrate conveyor ( or ) which conveyor alternately transports a substrate to the airlock station ( ) or away from the airlock station ( ), where the loading or unloading of substrates ( &prime;), located at the time in the vicinity of the airlock station, occurs dependent on the rotational motion of the inner cylinder.

Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates

A processing station arranged in a vacuum chamber (2) for the coating of workpieces by a device, which loads or empties the workpieces through at least one opening set in the chamber wall (3,3',3') of the vacuum chamber(2) which can be closed off with a cover (14,14'). The loading/unloading device includes a vertically oriented shaft (42), on which a pusher part (26,26') is affixed, which primarily is movable by a lever mechanism through a push/pull connecting rod (40,40'). A gripping device (10,10';11'11') is arranged on the pusher part (26,26') for the transport of the workpieces. Through rotation of the shaft (42), the push/pull connecting rod (40,40') is radially moved between an open position (P.sub.2) of the cover (14,14') near the axle and a closed position (P.sub.1) of the cover (14,14') away from the axle. In the closed position (P.sub.2) of the cover, the gripping device projects completely into the vacuum chamber (2). For the loading of the vacuum chamber (2) with work pieces (8,8'), the pusher part (26,26') is next loaded with the workpieces (8) to be processed. Through subsequent rotation of the loaded pusher part (26,26') about the shaft (42), the pusher part (26,26') is brought in front of the opening (24) of the vacuum chamber (2). Next, the pusher part (26,26') is moved toward the opening by rotation of the shaft (42) in a radial direction, and is closed vacuum tight with the cover (14,14') connected to the pusher part (26,26').

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Hainburg, Germany

Gerd Ickes