Von Ardenne Asset Gmbh &co. Kg

Rapido Waagen- Und Maschinenfabrik Gmbh

Gerd Arnold

Gerit Stude

Sebastian Siegert

Hans-Juergen Heinrich

Friedrich Wissmueller

Erhard Buettner

Florian Wiegand

Christian Gass

Frank Dubbert

Hans Jurgen Steiger

Brunhilde Schoenberg

Thomas Koeblitz

Wolfgang Melzer

According to various embodiments, a socket arrangement for holding an end block on a process chamber may include the following: a first socket element with a first fastening arrangement for fastening the first socket element on a process chamber wall and with a second fastening arrangement; and a second socket element with a third fastening arrangement, for fastening the second socket element on the first socket element and with a fourth fastening arrangement for fastening an end block on the second socket element; wherein the second fastening arrangement of the first socket element and the third fastening arrangement of the second socket element may be formed for engaging in one another with play in such a way that the second socket element may be deflectable in relation to the first socket element.

End block arrangement and socket arrangement

In various embodiments, an end block assembly for rotatably mounting a tubular electrode in a processing chamber is provided. The end block assembly includes a receptacle region for receiving a bearing assembly which has a coupling region for coupling the tubular electrode thereto, the bearing assembly of which the coupling region is supported by a sleeve of the bearing assembly. The sleeve is plug-fitted into the receptacle region. The sleeve is joined together from a plurality of segments, the external faces thereof forming a lateral surface of the bearing assembly and at least two segments thereof being formed from dissimilar materials. The external faces of the two segments are mutually aligned such that they are flush with one another.

End block assembly, bearing assembly, and method for manufacturing a bearing assembly

Process for the production of shaped bodies from biodegradable material

Growing community of inventors

Dresden, Germany

Gerd Arnold