Oce-technologies B.v.

Avanex Corporation

Gerardus Johannes Burger

Hendrik Harmen Van Den Vlekkert

Henricus Johannes Adrianus Van De Sande

Willem Maurits Hijmans

Dionysius Antionius Petrus Oudejans

Vincentius Laurentius Spiering

Job Elders

A method of forming a nozzle and an ink chamber of an ink jet device, includes forming a nozzle passage by subjecting a substrate to a directional first etch process from one side of the substrate; applying a second etch process from the same side of the substrate for widening an internal part of the nozzle passage, to form a cavity forming at least a portion of the ink chamber adjacent to the nozzle; and controlling the shape of the cavity by providing, on the opposite side of the substrate, an etch accelerating layer buried under an etch stop layer and by allowing the second etch process to proceed into the etch accelerating layer. The following steps precede the first etch process: forming an annular trench in the substrate on the side of the substrate where the nozzle is to be formed; and passivating the walls of the trench so as to become resistant against the second etch process. The material surrounded by the trench is removed in the first etch process.

Method of forming a nozzle and an ink chamber of an ink jet device by etching a single crystal substrate

An optical switch and method of making in which a large number of optical elements, which may be diffractive or refractive, are formed within the plane of a wafer to transmit light approximately perpendicularly to the wafer plane. The optical elements are formed on separate deformable mechanical elements, such as a plate rotatable about two axes lying approximately parallel to the wafer plane. Electrical elements, such as capacitor plates with a free-space gap therebetween selectively deform the mechanical elements in a micro electromechanical system (MEMS) arrangement with the optical elements disposed upon the mechanical elements to separately control the directions in which the light beams are transmitted. The optical switches may be formed in an array, and two levels of such arrays formed in separate wafers which are bonded together allow two-stage switching of light through the assembled structure.

Micro electromechanical system and method for transmissively switching optical signals

Growing community of inventors

Hengelo, Netherlands

Gerardus Johannes Burger