U.S. Philips Corporation

Gerard Van Engelen

Jan Van Eijk

Adrianus Gerardus Bouwer

Cornelis D Van Dijk

Johannes M Van Kimmenade

Gerard E Van Rosmalen

Willem G Opheij

Arthur Robert Van Es

Fransiscus Mathijs Jacobs

Frank B Sperling

Hendrikus H Cox

Johannes F Hoefnagels

Henricus W Janssen

Adrianus Van Der Pal

Henricus E Beekman

Adianus G Bouwer

Theodorus H De Nier

Jannis P Van Der Linde

Everardus T Turk

Positioning device with a reference frame for a measuring system, and a

A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

Positioning device with a vibration-free object table, and lithographic

A magnetic-tape player has a drive arrangement for winding a tape between two reel hubs. The drive arrangement can drive both reel hubs with different transmission ratios by a motor and four transmission devices. The drive arrangement is controlled entirely by a cam disc capable of counterclockwise rotation.

Apparatus with a drive arrangement of information carriers in the form

A device for measuring the angular velocity of a rotating object (35) is described, which device comprises a first disc (23) moving with the object and having a rotationally symmetrical pattern of interruptions (24), and a second disc (29) having a similar pattern and a detector (34) which receives radiation passed by the patterns and converts it into an electric measuring signal. The device is very accurate, reliable and compact. The linear velocity of an elongated object, for example a recording tape, can also be measured with the device.

Optical velocity measuring with efficient use of radiation passing

A positioning device includes a table (5, 69), which is displaceable in two coordinate directions (X, Y) by means of Lorentz forces of electric linear motors over a base (3) and is guided over the base (3) by means of a static gas bearing, which has an air gap thickness independent of the coil systems and magnet systems (15-21, 37-43) in the motors. The positioning device is particularly suitable for the manufacture of masks with patterns for integrated circuits.

Positioning device using Lorentz forces

A linear motor comprising first and second motor sections which are movable relative to one another along a motor axis. The first motor section includes a coil support carrying a coil system and the second motor section includes a magnet support carrying at least one pair of magnets which, at least when viewed along the motor axis, are spaced at a distance from one another to form a gap and which are arranged to cooperate with the system of coils across an air gap. The system of coils of the first motor section comprises a set of three coils arranged in line viewed along the motor axis, i.e. two peripheral coils and one central coil. The central coil has a coil length at least substantially equal to said distance between the pair of magnets of the second motor section. The central coil is disposed at least substantially completely opposite the gap between the magnets in a neutral position of the motor sections relative to each other.

Linear motor within a positioning device

An optical lithographic device having a machine frame (1) to which is fastened a lens system (11) having a vertical optical main axis (13). Below the lens system (11), a positioning device (35) is fastened on a support member (3) of the machine frame (1), by means of which device an object table (27) is displaceable relative to the lens system (11) over a guide surface (5) of the support member (3) extending perpendicular to the optical main axis (13). The device is provided with a force actuator system (67) fastened to a reference frame (83) and controlled by a feedforward control system (95). The force actuator system (67) exerts a compensatory force on the support member (3) with a direction opposite to a direction of a reaction force simultaneously exerted by the positioning device (35) on the support member (3), and with a value which is substantially equal to a value of the said reaction force. The control system (95) further comprises a negative acceleration feedback (107), whereby the force actuator system (67) exerts a control force on the support member (3) which is determined by an acceleration of the support member (3) measured by an acceleration transducer (111, 113, 115). The use of the force actuator system (67) prevents undesirable movements of the support member (3) under the influence of a reaction force exerted by the positioning device (35) on the support member (3) and under the influence of external forces. The optical lithographic device can be used inter alia for illuminating semiconductor substrates, where a semiconductor pattern provided on a mask (17) is imaged on a semiconductor substrate (25), which is positioned on the object table (27), by means of the lens system (11).

Optical lithographic device having a machine frame with force

A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions (X, Y) solely by Lorentz forces, while in a third coordinate direction (Z) the position of the table (101, 213) is determined by a static gas bearing. The two-step positioning device is particularly suitable for use in opto-lithographic devices.

Two-step positioning device using Lorentz forces and a static gas bearing

A scanning unit for an optical disc record carrier includes a radiation-sensitive detection system having a plurality of detection elements on which is formed a reflected image of the scanning spot on the track structure of the record carrier. A tracking error signal is derived by combining the output signals of detection elements situated on respective sides of a boundary line between two halves of the detection system, and comparing with each other the combined signals from both halves. Several different such tracking error signals are derived, for boundary lines having different orietations with respect to the direction of the track instantaneously being scanned. The tracking error signal corresponding to a boundary line most nearly parallel to the direction of such track will be of greatest amplitude, and is selected as the tracking error signal used for controlling the scanning unit to follow the center line of such track. This achieves improved tracking error sensitivity providing more accurate tracking over the entire track structure.

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Eindhoven, Netherlands

Gerard Van Engelen