Asml Netherlands B.v.

Gerard Johannes Boogaard

Nicolaas Rudolf Kemper

Marc Wilhelmus Maria Van Der Wijst

Frank Johannes Jacobus Van Boxtel

Günes Nakiboglu

Mark Constant Johannes Baggen

Martinus Van Duijnhoven

Sander Kerssemakers

Robertus Mathijs Gerardus Rijs

Hendrikus Herman Marie Cox

Patrick Willem Paul Limpens

Erwin Antonius Henricus Franciscus Van Den Boogaert

Jessica Henrica Anna Verdonschot

Michaël Johannes Anna Maria Walters

An actuator, configured to move a first object with respect to a second object, that includes a first body having an annular ring, a second body, arranged movably with respect to the first body, having a longitudinal shaft at least partially disposed within the annular ring, and at least one spring device, arranged between the first body and the second body, wherein the at least one spring device is configured to guide relative movements between the first body and the second body in a range of movement, and the at least one spring device has two or more leaf springs, wherein each of the two or more leaf springs is connected to the first body and to the second body, and wherein at least one of the leaf springs is in a non-planar state when the spring device is in an equilibrium position.

Guiding device

A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber () in communication with the compartment and a perforated plate (), having a plurality of through-holes (), between the chamber and the compartment.

Lithographic apparatus

Growing community of inventors

Zaltbommel, Netherlands

Gerard Johannes Boogaard