Asml Holding N.v.

Other

The Perkin-elmer Corporation

Gerald Theodore Volpe

Azat M Latypov

Jason Douglas Hintersteiner

Wenceslao A Cebuhar

Ralph J Amodeo

Leonard S Laskoski

Jerome D Gottesman

William J Swanson

The device described herein proposes an electronic active filter void of capacitors and inductors. The circuit utilizes only operational amplifiers (OP-Amp) and resistors, hence the name Op-R. Although capable of being constructed of lumped circuit elements this filter is intended for integrated circuit (IC) applications. Filtering of signals can be accommodated from dc through the UHF frequency range depending on the selected op-amp ICs. Low pass, band pass, high pass, as well as band reject frequency responses are achievable. Although the circuits described herein are single input-single output, multiple inputs and outputs present no difficulty, being limited only chip space. Temperature and production spread variations are also considered within the realm of tenability.

Op-R, a solid state filter

The device described herein proposes an electronic active filter void of capacitors and inductors. The circuit utilizes only operational amplifiers (Op-Amps) and resistors, hence the name Op-R. Although capable of being constructed of lumped circuit elements this filter is intended for integrated circuit (IC) applications. Filtering of signals can be accommodated sub-audio through the video frequency range depending on the selected op-amp ICs. Low pass, band pass, high pass, as well as ban reject frequency responses are achievable. Although the circuits described herein are single input-single output, multiple inputs and outputs present no difficulty, being limited only by chip space. Temperature and production spread variations are also considered within the realm of tenability.

In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.

Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography

Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography

A discrete-time analog filter for eliminating a variable frequency carrier of an amplitude-modulated signal. The filter comprises a plurality of unit delay circuits, each of which is sampled at a rate which varies in proportion to the frequency of the carrier so as to automatically tune the filter's reject band to follow the carrier frequency.

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Stamford, CT, United States of America

Gerald Theodore Volpe