Saint-Gobain Ceramics & Plastics, Inc.

Gerald S Meder

Andrew G Haerle

A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelletized CO cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.

Semiconductor processing component having low surface contaminant concentration

A method for cleaning an inorganic surface of a virgin semiconductor processing component by directing a flow of frozen CO pellets upon the surface. After cleaning, the component is packaged for transport and installation into a furnace used for processing semiconductor wafers.

Process for cleaning ceramic articles

A method for cleaning ceramic workpieces such as SiC boats used in semiconductor fabrication is disclosed. The method comprises washing a virgin or used ceramic workpiece with a strong acid and then using a pelleted CO,cleaning process on the acid-washed component. The inventive method has been found to produce a workpiece having a very low level of metallic and particulate contaminants on its surface.

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Phoenix, AZ, United States of America

Gerald S Meder