Helix Technology Corporation

Gerald R Pruitt

Graham J Higham

Ronald N Morris

James Livingstone

Bruce R Andeen

Robert J Lepofsky

Harry G Nicoll

Peter K Bertsch

David Tormey

Howard D Snively

Frank Heger

In a cryogenic refrigeration utilizing a linear drive motor, a temperature control system controls the displacement of an armature reciprocating at a fixed frequency to adjust the operating temperature of a working fluid at the cold end of a cold finger. Linear drive motors using dynamic absorbers to reduce vibration operate within the narrow frequency range to which the absorber is tuned. Controlling the maximum displacement of the armature used to compress the working fluid results in the ability to adjust the temperature at the cold end of the refrigeration without altering the frequency of operation.

Temperature control system for a cryogenic refrigeration

A linear motor compressor within a cryogenic refrigerator wherein the compressor space, within which a gaseous fluid is alternately compressed and expanded, is formed by a stationary piston and a reciprocating armature that is concentric about the piston. The armature is supported along a clearance seal the stationary piston. An axial bore along the stationary piston conveys gaseous fluid from the compression space to a displacer within the cold finger of the cryogenic refrigerator. An isolator for reducing transimission into and out of the compressor comprising a dynamic absorber and flat springs mounted with a damping material between the compressor and a mounting frame. A sensor for detecting the position of the armature utilizes a target magnet whose magnetic flux lines are decoupled from the flux lines generated about the coil.

Linear motor compresser with stationary piston

The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively irradiating the primary cryopanel from a location external to the vacuum chamber. The radiation raises the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.

Means for periodic desorption of a cryopump

The present invention relates to a cryopump having a gas bearing formed in a clearance seal between a piston and a cylinder. The gas bearing is formed by forcing pressurized gas from a gas plenum through orifices to the clearance seal.

Dry roughing pump having a gas film bearing

A two mass vibration isolator particularly suited to a linear reciprocating machine. Vibration into and out of the machine is attenuated by an isolator placed between the machine and its mounting frame. The isolator is an elastomer with a damping ratio of at least 0.1 sandwiched between two retainers.

Vibration isolation system for a linear reciprocating machine

In a cryogenic split Stirling refrigerator, the compressor is driven by linear drive motors. Each linear drive motor has an armature hermetically sealed by a housing 20. Surrounding the housing is a stator formed from two bodies each housing a drive coil 48 and 49. Each body consists of two components 52-55 formed from involute laminations which have been aligned after the coil has been inserted. Separating the bodies is a magnet 56.

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Mendon, MA, United States of America

Gerald R Pruitt