Brooks Automation Gmbh

Hitachi Zosen Corporation

Pri Automation, Inc.

Symbotic LLC

Symbolic LLC

Murata Machinery, Ltd.

Serac Group

Gerald M Friedman

Michael Lawrence Bufano

William John Fosnight

Steven Raymond Walther

Christopher A Hofmeister

Ulysses Gilchrist

Mitchell Weiss

Brian Phillips

Anne Testoni

William Frederick Thomson

Peter F Hays

P Michael Fletcher

Michael J Kapust

Arthur Wayne Sommerstein

Mord Wiesler

Stephen Whittaker Into

Robert P Sullivan

Clint Haris

Fosnight William

Gilchrist Ulysses

An autonomous transport vehicle including a frame forming a payload area, telescoping arms movably mounted to the frame, each telescoping arm being configured for extension and retraction relative to the frame along an extension axis to effect transfer of at least one pickface to and from the payload area, and traversal, relative to the frame, in at least one direction that is angled to the extension axis, and at least one tab extending from each telescoping arm where the at least one tab extends in a direction transverse to the direction of extension and retraction, and the at least one tab on one of the telescoping arms opposes the at least one tab on another of the telescoping arms.

Automated storage and retrieval system

A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Elevator-based tool loading and buffering system

A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Reduced capacity carrier and method of use

An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.

Electron beam exit window in electron beam emitter and method for forming the same

Improved electron beam sterilization apparatus and shielding techniques for use in are provided. A controller modulates an electron beam when sterilizing an interior to an object to ensure that adequate dose is received. Sterilization carousels are configured with input/discharge feeds to reduce the possibility of humans being exposed to dangerous levels of radiation. The system reduces the amount of shielding required to thereby lower cost of installation.

Electron beam sterilization apparatus

An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons. The at least one electron source has a width. The electron generator housing can have an electron permeable region spaced from the at least one electron source for allowing extraction of the electrons from the electron generator housing. The electron permeable region can include a series of narrow elongate slots and ribs formed in the electron generator housing and extending laterally beyond the width of the at least one electron source. The electron permeable region can be configured and positioned relative to the at least one electron source for laterally spreading the electrons that are generated by the at least one electron source.

Electron beam emitter with slotted gun

Methods and apparatuses for reducing heat on an emitter exit window

A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tunnel. A carrier nest on the vehicle receives and supports the carrier. A lifting mechanism on the vehicle vertically raises and lowers the carrier nest. A load port support surface is disposed vertically above the support structure. The carrier is raised through an opening in the load port support surface. A load port nest on the load port support surface receives and supports the carrier adjacent a selected destination. A carrier manipulation mechanism manipulates the carrier over the load port nest. The lifting mechanism then lowers the carrier onto the load port nest. The system is particularly suited for handling and transporting semiconductor wafer carriers.

Material handling and transport process

An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

Extractor/buffer

Material handling and transport system and process

A self supporting electrical cable is provided which is especially of use in linear motion devices. The cable is in the form of a band having a crowned or curved cross-section. The band is self supporting and is typically employed in a looped configuration. The band is composed of a Mylar or other plastic or electrically insulating laminate with electrical conductors and reinforcing elements. The conductors are typically copper and the reinforcing elements are typically stainless steel. In use the cable is usually folded back on itself 180&deg; to provide a loop configuration with a fixed radius loop end in which the loop is moveable along the direction of travel. One end of the cable is connected to the linear motion device, and the other end is connected to a stationary device.

Growing community of inventors

New Ipswich, NH, United States of America

Gerald M Friedman