Advanced Micro Devices Corporation

Globalfoundries Inc.

Gerald L Goff

Michael R Conboy

Antonio DiNapoli

Roger A Sikes

Elfido Coss, Jr

Michael D Smith

Donald Craig Likes

Leslie Marshall

Michael L Muecke

A method for dispatching wafers for processing in a tool includes identifying a queue of wafers available to be processed in the tool. One of the wafers is randomly selected based at least in part on a length of time each wafer has been in the queue. The selected wafer is dispatched for processing in the tool.

Method and apparatus for randomizing dispatch order for single wafer processing

An automated system is presented for containerless transfer of semiconductor wafers through a wall separating a first fabrication area and a second fabrication area. The system includes multiple containers for transporting the wafers, one or more air lock chambers, mass transfer systems, robotic arms, stock areas, and a control system. The containers (e.g., wafer boats) are dispersed between the first and second fabrication areas. A portion of the containers contain at least one semiconductor wafer, and the remainder of the containers are empty. The air lock chambers are positioned in sealed openings in the wall. The air lock chambers provide isolation between the first and second fabrication areas while permitting the transfer of semiconductor wafers between the fabrication areas. A mass transfer system is positioned within each air lock chamber and allows for containerless transfer of wafers through the air lock chamber. The stock areas provide storage areas for containers adjacent to each air lock chamber. The robotic arms are used to move the containers between the stock areas and each air lock chamber. The control system governs the dispersal of containers and the operations of the air lock chambers, the mass transfer systems, the robotic arms, and the stock areas.

Automated wafer transfer system

A method and apparatus is presented for transferring semiconductor wafers through a barrier between two separate fabrication areas without the transfer of a container (i.e., wafer boat) with the wafers. The method includes providing an air lock chamber configured within a wall separating a first fabrication area and a second fabrication area. A first door providing access to the air lock chamber from the first fabrication area is opened and a first wafer boat containing the wafers is placed into the air lock chamber. The wafers are removed from the first wafer boat and placed in the air lock chamber. The empty first wafer boat is then removed from the air lock chamber, and the first door is closed. A second door providing access to the air lock chamber from the second fabrication area is opened, and an empty second wafer boat is placed into the air lock chamber. The wafers in the air lock chamber are then placed into the empty second wafer boat, and the second wafer boat containing the wafers is removed from the air lock chamber. The second door is then closed, completing the transfer of the wafers. In a preferred embodiment, the air lock chamber contains a mass transfer system which automatically performs the steps of (i) removing the wafers from the first wafer boat, and (ii) placing the wafers into the empty second wafer boat. The mass transfer system also stores the wafers inside the mass transfer system during the transfer operation.

Container-less transfer of semiconductor wafers through a barrier

An apparatus for storing articles includes a rack, structure for supporting the rack, structure for rotatably connecting the rack to the structure for supporting so that the rack can rotate from a first stable position described by a horizontal plane to a second stable position described by a vertical plane, structure for fixedly holding the rack when the rack is in the first stable position; and structure for fixedly holding the rack when the rack is in the second stable position.

Collapsible rack

A test fixture for a boat having a plurality of slots for holding wafers includes a base for fixedly holding a boat to be tested; a wafer simulator, which wafer simulator includes a plurality of wafers sized to properly seat in the plurality of slots in the boat; structure for moving the plurality of wafers of the wafer simulator wholly into and out of the plurality of slots in the boat; and structure determining whether the plurality of wafers is properly seated in the plurality of slots in the boat when the wafer simulator is moved wholly into the plurality of slots in the boat.

Boat test apparatus

A cordless wand device for grasping objects such as silicon wafers during the manufacture of integrated circuits. The wand device comprises a housing having a hollow interior and a tip for grasping objects. The tip is attached to the housing through a hollow tube, and has a perimeter region contoured to form an airtight seal when placed against the surface of an object to be grasped. The tip also has a recessed interior region having an air inlet therein. The wand device includes a power source and a vacuum pump positioned within the housing. The vacuum pump produces a suction force at the air inlet on the tip. When the tip is placed against the surface of an object, the object is securely grasped due to the suction force exerted thereon by the wand tip. A switch located on the wand may be used to turn the vacuum pump on or off in order to grasp or release the object. Light-emitting diodes of different colors indicate to an operator whether or not the power source is sufficiently charged to generate sufficient suction force to safely grasp the object.

Cordless vacuum wand

A clip for removably securing a semi-conductor wafer to the treatment surface of a semi-conductor wafer processing pedestal. The clip is constructed with a pair of spaced apart, forwardly extending tines adapted to engage outer edges of a semi-conductor wafer supported upon the treatment surface. A clip tail is oppositely disposed from the tines and affords resilient movement of the tines toward and away from the edges of the pedestal treatment surface to enable the installation and removal of the wafer therefrom.

Method of securing semi-conductor wafer using retention clip

Semi-conductor wafer retention clip

A method and apparatus for lifting select semi-conductor wafers from a quartz wafer boat. A removable transfer platform is provided for receiving a quartz wafer boat and positioning the wafer boat above upwardly extending fingers adapted for engaging wafers disposed therein. The upwardly extending wafer engagement fingers are mounted on a wand that is programmed for select vertical and horizontal movement relative to the wafer boat. The fingers of the wand also include ends adapted for engaging the peripheral edges of the wafer supported within the wafer boat for being lifted therefrom.

Method of and apparatus for semi-conductor wafer selection

A removable handle for use in handling semi-conductor wafer processing cassettes includes a horizontally extending front coupling bar with coupling channels on each end for engaging flanges on the cassette. A handle includes a body portion which is mountable to and extends transversely from the coupling bar. A grip portion extends angularly from the body and is furnished with contoured finger portions. The grip includes a finger trigger for actuating a spring biased resilient plunger mechanism to engage the sidewall of the cassette and secure it to the coupling bar. The grip also includes a thumb latch for releasing the plunger mechanism, in resonse to the spring bias, and allowing the handle to be disengaged from the cassette.

Growing community of inventors

Austin, TX, United States of America

Gerald L Goff