Average Co-Inventor Count = 4.13
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (3 from 993 patents)
3 patents:
1. 6673716 - Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques
2. 6652718 - Use of RF biased ESC to influence the film properties of Ti and TiN
3. 6342133 - PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter