Greene, Tweed of Delaware, Inc.

Greene, Tweed & Co.

George Rawa

Christopher Corrado

Carmin Quartapella

Timothy Edwards

A self contained sensing apparatus includes a housing establishing an interior compartment, the housing having a maximum thickness which is less than the size of a gate opening of a semiconductor wafer processing chamber for inserting the housing into the semiconductor wafer processing chamber for sensing a parameter. The housing includes a window extending through a principal housing surface. A sensor is provided within the housing and generally aligned with the window for sensing at least one parameter. A transmitter is provided within the housing and coupled with the sensor for receiving signals representative of the sensed parameter and transmitting the signals out of the housing.

Self contained sensing apparatus and system

A self contained sensing apparatus includes a housing establishing an interior compartment, the housing having a maximum thickness which is less than the size of an access portal for inserting the housing into an area for sensing. The housing includes a window extending through a principal housing surface. A sensor is provided within the housing and generally aligned with the window for sensing at least one parameter. In a preferred embodiment, the sensor is an optical sensor for sensing images through the window. A transmitter is provided within the housing and coupled with the sensor for receiving signals representative of the sensed parameter and transmitting the signals out of the housing.

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Harleysville, PA, United States of America

George Rawa