Applied Materials, Inc.

George Mattinger

Gregory J Wilson

Eric Andrew Englhardt

Nolan Layne Zimmerman

Balamurugan Ramasamy

Steven Poppe

Nyi Oo Myo

A seal ring for an electrochemical processor does not slip or deflect laterally when pressed against a wafer surface. The seal ring may be on a rotor of the processor, with the seal ring having an outer wall joined to a tip arc through an end. The outer wall may be a straight wall. A relatively rigid support ring may be attached to the seal ring, to provide a more precise sealing dimension. Knife edge seal rings that slip or deflect laterally on the wafer surface may also be used. In these designs, the slipping is substantially uniform and consistent, resulting in improved performance.

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Cupertino, CA, United States of America

George Mattinger