Tokyo Electron Limited

Fujikin Inc.

Ckd Corporation

Toshiba Ceramics Co., Ltd.

George Hoshi

Kazutoshi Miura

Michio Yamaji

Hiroyuki Yamamoto

Takanori Saito

Kazuhiro Yoshikawa

Ken Nakao

Tsuneyuki Okabe

Katsutoshi Ishii

Takanobu Asano

Eiichi Toya

Yuji Kawano

Harunari Hasegawa

Norihiko Saito

Tomio Konn

Tomohiro Nagata

Kenichi Goshima

Hiroyuki Honma

Sunao Seko

Akira Otsu

Katsutoshi Ishi

Hideo Kobayashi

Akinori Nagaya

Hiroshi Mori

Railscorresponding to lines A, B, C are provided in parallel on a bass plate, and coupling membersare slidably mounted on each of the rails. Each of fluid controllersis mounted generally on two of these coupling members

Fluid control device

Each of lines A, B is provided on each of opposite sides thereof with a tape heater, and a space for positioning a tape heater holding cliptherein is provided in each of locations between adjacent fluid control devices. The tape heatersare held from opposite sides thereof to the line by the clip. The lines A, B provided with the heaters are each mounted on a line support memberremovably attached to a base member. The line support memberhas a heater insertion boreformed therein and extending longitudinally thereof. A sheath heateris inserted into the bore

Fluid controller

A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2&#xd7;10g/cmor less.

Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.

Heat treatment system and method

Growing community of inventors

Tsukui-gun, Japan

George Hoshi