Kawasaki Jukogyo Kabushiki Kaisha

Kawasaki Robotics (usa), Inc.

George Chin

Hajime Nakahara

Masaya Yoshida

Avish Ashok Bharwani

Haruhiko Tan

Takao Yamaguchi

Atsushi Nakaya

Simon Jeyapalan

Luc Nguyen

An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating deviceis rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.

Aligner apparatus

A robot system according to an embodiment may include a robot, a wafer jig that is held by the robot, a positioning base, a positional displacement detection device, a control part, and an offset acquisition part for acquiring an offset that occurs between a command position for the robot and an actual position. The positioning base includes contacting members. The wafer jig has a tapered surface. The tapered surface guides the wafer jig so that a center of the wafer jig approaches a predetermined position as a position where the taped surface contacts the contacting members is relatively higher. The robot places the wafer jig on the positioning base, then holds and conveys the wafer jig to the positional displacement detection device. The offset acquisition part acquires the offset based on a result in which the positional displacement detection device detects a positional displacement of the conveyed wafer jig.

Robot system and offset acquisition method

A method of teaching a robot includes: a swinging step of causing a hand to swing about a predetermined pivot, which is on an axis perpendicular to an optical axis of a sensor beam, to scan a target in a horizontal direction of the sensor beam; a determining step of determining whether or not the target has coincided with a position along a central axis of the hand in its longitudinal direction based on a detection signal of a mapping sensor, the detection signal having changed owing to the swinging of the hand; and a shifting step of, if it is determined in the determining step that the target has not coincided with the position, calculating an offset amount of the hand based on the detection signal of the mapping sensor, the detection signal having changed owing to the swinging of the hand, and causing the hand to shift to either right or left along the optical axis of the sensor beam in accordance with the calculated offset amount.

Method of teaching robot and robot

Growing community of inventors

San Leandro, CA, United States of America

George Chin