Massachusetts Institute of Technology

California Institute of Technology

University of Arizona

Stx Aprilis, Inc.

Other

Samsung Electronics Co., Ltd.

George Barbastathis

Demetri Psaltis

Henry Ignatius Smith

Rajesh Menon

Dario Gil

Gregory Nolan Nielson

David J Carter

Yuan Luo

William Jay Arora

Steven G Johnson

Richard C Lanza

Chee Wei Wong

Gareth H McKinley

Akintunde Ibitayo Akinwande

Rajiv Gupta

Sang-Gook Kim

Hyungryul Johnny Choi

Berthold Klaus Paul Horn

Marin Soljacic

Karen K Gleason

Robert E Cohen

Daniel Henri Raguin

David A Waldman

Se Baek Oh

Jeffrey Scott Herd

Suraj Deepak Bramhavar

Allen Pu

Jennifer K Barton

Raymond K Kostuk

Cheryl Marie Sorace-Agaskar

Jean-Jacques P Drolet

Boris G Kharas

Jamison Sloan

Josue Lopez

Samuel Kim

Jeong-gil Kim

Kyoo Chul Park

Michael J Levene

Wyatt E Tenhaeff

Anthony John Nichol

Christophe Moser

Sung Jin Lee

Michael F Rubner

Jonah H Jacob

Fai Ho Mok

Jean-Jacques Emile Slotine

Wei-Chuan Shih

Fernando J Castano

Jose Dominguez-Caballero

Chih-Hao Chang

Laura A Waller

Satoshi Takahashi

Wenyang Sun

Wenhai Liu

Jose Mumbru

Yong-Bae Jeon

Kyu Chul Park

Arnab Sinha

Hyo Min Lee

Dye-Zone A Chen

An integrated optical beam steering device includes a planar Luneburg lens that collimates beams from different inputs in different directions within the lens plane. It also includes a curved (e.g., semi-circular or arced) grating coupler that diffracts the collimated beams out of the lens plane. The beams can be steered in the plane by controlling the direction along which the lens is illuminated and out of the plane by varying the beam wavelength. Unlike other beam steering devices, this device can operate over an extremely wide field of view&#x2014;up to 180&#xb0;&#x2014;without any aberrations off boresight. In other words, the beam quality is uniform in all directions, unlike with aplanatic lenses, thanks to the circular symmetry of the planar Luneburg lens, which may be composed of subwavelength features. The lens is also robust to misalignment and fabrication imperfections and can be made using standard CMOS processes.

Planar Luneburg lens system for two-dimensional optical beam steering

System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

Apparatus and method for nanoscale X-ray imaging

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

Nanoscale X-ray tomosynthesis for rapid analysis of integrated circuit (IC) dies

System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

System and method for nanoscale X-ray imaging of biological specimen

Titania-based porous nanoparticle coatings are mechanically robust, with low haze, which exhibit short time scales for decomposition of fingerprint oils under ultraviolet light. The mechanism by which a typical dactylogram is consumed combines wicking of the sebum into the nanoporous titania structure followed by photocatalytic degradation. These TiOnanostructured surfaces are also anti-fogging, anti-bacterial, and compatible with flexible glass substrates and remain photocatalytically active in natural sunlight.

Anti-fingerprint photocatalytic nanostructure for transparent surfaces

A volume holographic imaging system, apparatus, and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-f telecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.

System, method and apparatus for phase contrast enhanced multiplexing of images

System, method and apparatus for wavelength-coded multi-focal microscopy

Inverted Nanocone Structures and Its Fabrication Process. The method of fabricating nanotextured structures includes making a master mold having an array of tapered structures to be replicated. The master mold is pressed into a curable polymer supported on a substrate and the polymer is cured. Thereafter, the mold is detached from the cured polymer to form the nanotextured structure.

Inverted nanocone structures for multifunctional surface and its fabrication process

One aspect of the invention relates to an ultrathin micro-electromechanical chemical sensing device which uses swelling or straining of a reactive organic material for sensing. In certain embodiments, the device comprises a contact on-off switch chemical sensor. For example, the device can comprises a small gap separating two electrodes, wherein the gap can be closed as a result of the swelling or stressing of an organic polymer coating on one or both sides of the gap. In certain embodiments, the swelling or stressing is due to the organic polymer reacting with a target analyte.

Electro-mechanical switches and methods of use thereof

A volume holographic imaging system, apparatus and/or method enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) probing object A 4D probing source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. A 4-ftelecentric relay system includes a pupil filter on the relayed conjugate plane of the volume hologram and images the pupil of the volume hologram onto the front focal plane of the collector lens. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object.

System, method and apparatus for contrast enhanced multiplexing of images

A volume holographic imaging system enables the projection of a two-dimensional (2D) slice of a four-dimensional (4D) object. The 4D source object is illuminated to emit or scatter an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam. A phase mask is encoded in one or more multiplexed holographic gratings of the holographic element using a spatial filter. A collector lens focuses the diffracted plane beam to a 2D slice of the 4D probing source object. The focused 2D slice is projected onto a 2D imaging plane. The holographic element may have multiple multiplexed holograms that are arranged to diffract light from a corresponding slice of the 4D probing source object to a non-overlapping region of the detector.

System, method and apparatus for phase-coded multi-plane microscopy

Fabrication method. At least first and second hardmasks are deposited on a substrate, the thickness and materials of the first and second hardmask selected to provided etch selectivity with respect to the substrate. A nanoscale pattern of photoresist is created on the first hardmask and the hardmask is etched through to create the nanoscale pattern on a second hardmask. The second hardmask is etched through to create the desired taper nanocone structures in the substrate. Reactive ion etching is preferred. A glass manufacturing process using a roller imprint module is also disclosed.

Process for making nanocone structures and using the structures to manufacture nanostructured glass

Phase differences associated with a defocused wavefront can be determined from a single color image. The color image, which is a measurement of intensity as a function of wavelength, is used to calculate the change in intensity with respect to wavelength over the image plane. The change in intensity can then be used to estimate a phase difference associated with the defocused wavefront using two-dimensional fast Fourier transform solvers. The phase difference can be used to infer information about objects in the path of the defocused wavefront. For example, it can be used to determine an object's shape, surface profile, or refractive index profile. It can also be used to calculate path length differences for actuating adaptive optical systems. Compared to other techniques, deriving phase from defocused color images is faster, simpler, and can be implemented using standard color filters.

Phase from defocused color images

Growing community of inventors

Boston, MA, United States of America

George Barbastathis