Other

Accuray Inc.

Electroglas, Inc.

George Asmerom

Uday G Nayak

Max Jedda

Xiaolan Zhang

Gopinath Kuduvalli

Sohail Sayeh

Jian Gao

Sankaralingam Ramraj

An apparatus includes a portion that moves along a guided path and a displacement gauge that outputs readings based on the portion's position on the guided path. The apparatus additionally includes an intermediate limit switch that is activated in response to the portion being moved to an intermediate position on the guided path. The apparatus also includes a processing device configured to calibrate the apparatus based on a first reading corresponding to a first position on the guided path and a second reading corresponding to a second position on the guided path. The processing device verifies the calibration based on a third reading corresponding to the intermediate position.

Automatic calibration for device with controlled motion range

An improved method and apparatus for automatically and accurately aligning a wafer prober to the bonding pads of a semiconductor device are provided. In one embodiment of one aspect of the invention, a multi-loop feedback control system incorporating information from a number of sensors is used to maintain the desired contact position in the presence of disturbances. Other aspects and other embodiments are also described.

Methods and apparatuses for improved positioning in a probing system

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San Jose, CA, United States of America

George Asmerom