Mentor Graphics Corporation

Georg P Lippincott

Junjiang Lei

Le Hong

Aspects of the invention relate to techniques for applying edge fragment correlation information to optical proximity correction. Neighbor-aware edge adjustment values for the edge fragments are computed based on edge placement error values and edge fragment correlation information. The computation comprises: selecting a group of edge fragments around a center edge fragment, calculating preliminary neighbor-aware edge adjustment values based on the edge placement error values and the edge fragment correlation information for the group of edge fragments, storing the preliminary neighbor-aware edge fragment adjustment value for the center edge fragment, and repeating the selecting, the calculating and the storing with each of the edge fragments being the center edge fragment. The computed neighbor-aware edge adjustment values are combined with conventional edge adjustment values and the edge fragments are adjusted accordingly. The process may be repeated for a number of times.

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Lake Oswego, OR, United States of America

Georg P Lippincott