Average Co-Inventor Count = 10.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Multisem Gmbh (1 from 32 patents)
1 patent:
1. 12255040 - Multi-beam particle beam system and method for operating same