Dr. Johannes Heidenhain Gmbh

Johannes Heidenhain Gmbh

Dr. Johannas Heidenhain Gmbh

Georg Flatscher

Peter Speckbacher

Erich Bayer

Martin Ullrich

Michael Allg&auml;uer

Anton Beckerbauer

Anton Sailer

Dieter Michel

Erwin Spanner

Andreas Franz

Michael Allgauer

Walburga Kern

In a method for producing a scale in the form of a phase grating, the scale itself, and a position measuring device including the scale, the scale includes two reflection layers located at a distance from one another on either side of a spacer layer. The production of the scale includes the following steps: provision of a first reflection layer, which is unbroken over its entire surface and fulfils the relationship A=R/&#x3b7;&#x2267;3, where R represents the degree of reflection and &#x3b7; represents the backscatter coefficient for electrons; application of the spacer layer to the first reflection layer; application of the second reflection layer to the spacer layer; and structuring of the second reflection layer by an electron beam lithography process.

Method for manufacturing a scale, a scale manufactured according to the method and a position measuring device

A method for producing a self-supporting electron-optical transparent structure that includes multi-layer strips and recesses located between the multi-layer strips. The method includes applying a first layer to a second layer, presetting a pattern by exposing or irradiating the first layer and etching the pattern out of the first layer so that partial areas of the second layer are uncovered. The method further includes galvanically applying layers to the uncovered partial areas of the second layer so that multi-layer strips are formed thereon and an electron-optical transparent structure is formed and removing the electron-optical transparent structure off the second layer.

Method for producing a self-supporting electron-optical transparent structure, and structure produced in accordance with the method

A reflective measuring scale graduation, as well as a method for manufacturing the same are described. The reflective measuring scale graduation includes first and second subdivisions having different reflection properties, which extend in at least one first direction on a reflecting substrate. The highly reflecting first subdivisions are made of a plurality of partial layers having different indices of refraction and function as an interference filter. The low reflecting second subdivisions are composed of at least one absorber layer on the substrate.

Reflective measuring scale graduation and method for its manufacture

In a position measuring device, a scale is embodied as a phase grating on which several partial beams impinge and are diffracted and caused to interfere with each other in the scanning unit. The entry angle (&agr;) of the partial beams corresponds to the Littrow angle, so that the diffracted partial beams of &plusmn;1st diffraction order are diffracted at the same angle &bgr;&equals;&agr;. The diffraction efficiency of the scale is particularly great if the flanks of the bars of the scales are at an angle of approximately 70&deg; with respect to the measuring direction, i.e., if the bars and gaps are embodied to be trapezoidal in cross section.

Photoelectric position measuring device

A scale for opto-electrical linear or angular measuring systems. A gradation in the form of a phase grating is embodied on the scale and has alternating raised and stepped areas. A continuous compensating layer of chrome and on it a continuous highly reflective layer of titanium nitride are applied to one side of a step-like structured base body. The material and the layer thickness of the compensating layer is selected in such a way that it counteracts the mechanical stresses of the reflecting surface layer and thus, in the finished state of the scale, the deposited layers no longer exert stresses on the base body.

Scale and method for making a scale

The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.

Phase grating and method of producing phase grating

An evaporator device system having an electron jet heating device for the vaporization of several materials onto a substrate in a vacuum chamber includes at least two crucibles for the reception of respective evaporation materials. These crucibles are concentrically arranged on a turntable. For the more uniform evaporation of the material, at least the crucible aligned with the electron jet is caused to rotate in the turntable during operation of the eletron jet heating device.

Evaporator device for the evaporation of several materials

A recording medium with a multicolor high resolution pattern created by layer packs. Pattern-forming layers of the layer packs are successively applied by photolithographic means in a sequence corresponding to a color of the high resolution pattern. The pattern-forming layers of the layer packs are separate from one another on the substrate of the recording medium. The process for producing the recording medium includes applying a photoresist layer to a substrate and developing the photoresist. Pattern-forming layers are successively applied over the whole surface of the substrate in a sequence corresponding to a color. The remaining photoresist and the layers overlying it are removed to leave a sequence of pattern-forming layers on the substrate separate from any adjacent pattern-forming layers.

High resolution recording medium and method for producing same

A multi-color, high density recording medium including a substrate having at least two patterned interference filters formed thereon is described. Each of the filters transmits a different wavelength range of visible light and each of the filters comprises an unpatterned interference layer of an inorganic material which is substantially absorption-free in the visible wavelength range of the spectrum. At least one of the interference filters formed on the substrate comprises a first, unpatterned reflecting layer positioned on one side of the respective interference layer, and a second, patterned reflecting layer positioned on the other side of the respective interference layer, such that the pattern of only the first reflecting layer forms the pattern of the at least one interference filter.

Growing community of inventors

Schneizlreuth, Germany

Georg Flatscher