Suss Microtec Lithography Gmbh

Georg Fink

Sven Hansen

Henrik Petry

Matthias Conradi

Uwe Vogler

Christian May

Ghazahleh Jalali

Fabian Kloiber

A stamp replication device for producing stamps for the production of at least one of microstructured and nanostructured components has a platform, a cover that is positionable on the platform and a holding device for a stamp carrier, wherein the holding device is provided on the cover or on the platform and includes a carrier as well as a microstructured vacuum surface on the carrier for holding the stamp carrier. In addition, a method for producing a holding device for a stamp replication device as well as a method for producing a stamp are specified.

Stamp replication device and method for producing a holding means for a stamp replication device as well as a stamp

The invention relates to a positioning device for positioning a substrate, in particular a wafer, comprising: a process chamber; a base body; a carrier element which comprises a support for supporting the substrate, the carrier element being arranged above the base body and formed movable in terms of distance from the base body; and a holder for an additional substrate, in particular an additional wafer or a mask, the holder being arranged opposite the carrier element; wherein there is, between the base body and the carrier element, a sealed-off cavity to which a pressure, in particular a negative pressure, can be applied so as to prevent undesired movement of the carrier element as a result of the action of an external force.

Positioning device

The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head () comprises a movable part (), a stationary part () and at least three linear actuators (). Each linear actuator () is connected to one of the parts () at one end and to the other of the two parts () by wedges () at the other end. By means of the wedges (), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators () are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.

Method and device for active wedge error compensation between two objects that can be positioned substantially to parallel to each other

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Garching, Germany

Georg Fink