Renesas Electronics Corporation

Toppan Printing Co., Ltd.

Toppan Photomask Co., Ltd.

Genta Watanabe

Norihito Fukugami

Koichi Takeda

Takaharu Tsuji

Ken Matsubara

Akihiko Kanda

Tomohiro Imoto

Yo Sakata

Toru Komizo

Takahiro Shimoi

Kazuaki Matsui

Tomoya Saito

Eisuke Narita

A semiconductor device capable of changing a data programming process in a simple manner according to a situation is provided. The semiconductor device includes a plurality of memory cells, a programming circuit for supplying a programming current to the memory cell, and a power supply circuit for supplying power to the programming circuit. The power supply circuit includes a charge pump circuit for boosting the external power supply, a voltage of the external power supply according to the selection indication, and a selectable circuit capable of switching the boosted voltage boosted by the charge pump circuit. The control circuit further includes a control circuit for executing data programming processing by the programming circuit by switching the selection indication.

Semiconductor device and semiconductor system

There is provided a reflective photomask blank and a reflective photomask having good irradiation resistance and capable of obtaining good transfer performance. A reflective photomask blank () contains a reflective layer () reflecting incident light and an absorption layer () absorbing incident light, which are formed in this order on one surface side of a substrate (). The absorption layer () contains a first material selected from the group consisting of tin, indium, and tellurium and a second material containing one or two or more kinds of materials selected from the group consisting of transition metals, bismuth (Bi), and silicon (Si) at least in the outermost layer. The content of the second material is more than 20 at and less than 50 at % in the same laver.

Reflective photomask blank and reflective photomask

A reflective photomask includes: a substrate; a multilayer reflection film formed on the substrate and reflecting exposure light including light with a wavelength of about 5 nm to 15 nm for lithography; an absorption film formed on the multilayer reflection film and absorbing the exposure light, and formed therein with a circuit pattern or a circuit pattern forming region where the circuit pattern is formed; a shading region formed by removing part of the multilayer reflection film and the absorption film on the substrate, on an outer peripheral side of the circuit pattern or the circuit pattern forming region to shade part of the exposure light reflected by the multilayer reflection film; and a plurality of projections formed at a pitch of about 3000 nm or less on part of a surface of the substrate exposed in the shading region, and suppressing reflection of out-of-band light with a wavelength of about 140 nm to 800 nm included in the exposure light and incident on the shading region.

Reflective photomask and production method therefor

A reflective mask having a light-shielding frame with high light-shielding performance, and a method for manufacturing thereof. In a reflective mask having a light-shielding frame dug into a multilayered reflective layer, when side etching is performed or processing to obtain a reverse tapered shape is performed only on the multilayered reflective layer, it becomes possible to suppress reflection of EUV light (extreme ultraviolet light) in the vicinity of the edge of the light-shielding frame, provide a reflective mask having high light-shielding ability, and form a transcription pattern with high accuracy.

Reflective mask and method for manufacturing same

A write disturbance margin of reference cells that generate reference current during read is improved. A bit line forms a clad interconnect structure in the normal cell region where normal cells are disposed, and a partially clad or non-clad interconnect structure in the reference cell region where a reference cell is disposed. Thus, a writing magnetic field intensity applied to the reference cell is smaller than the write magnetic field intensity applied to a normal memory cell during identical write currents.

Semiconductor device

Growing community of inventors

Tokyo, Japan

Genta Watanabe