Carl Zeiss Smt Gmbh

Leybold Gmbh

Carl Zeiss Microscopy Gmbh

Carl-Zeiss-Smt Ag

Gennady Fedosenko

Leonid Gorkhover

Hin Yiu Anthony Chung

Michel Aliman

Alexander Laue

Armin Schoeppach

Ulrich Bingel

Gerd Klose

Stefan Wiesner

Claudia Ekstein

Albrecht Ranck

Michael Widmann

Ruediger Reuter

Hans-Joachim Trefz

Guenter Albrecht

Martin Antoni

Alexandra Pazidis

Johannes Rau

Stephan Six

Thorsten Benter

Peter Awakowicz

Ruediger Duesing

Rudiger Reuter

Andreas Gorus

Valerie Derpmann

Achim Von Keudell

Johnannes Rau

Marc Boeke

Joerg Winter

Marc BÖKE

Jörg Winter

Theodore Lundquist

Rüdiger Reuter

A mass spectrometer includes an ion trap, which has an interior for storing ions, a signal generator, which is connected to an electrode of the ion trap, which delimits the interior, for coupling in a voltage signal, in particular a radiofrequency voltage signal, and an ionization device for ionizing a gas to be ionized and supplied to the interior. The ionization device is connected to the signal generator in order to use the voltage signal (U, U, U) of the signal generator, which is coupled into the electrode, for generating ions.

Mass spectrometer comprising an ionization device

A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.

Method for mass spectrometric examination of gas mixtures and mass spectrometer therefor

The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.

Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture

An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Ionization device with mass spectrometer therewith

A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Method for examining a gas by mass spectrometry and mass spectrometer

A method and a device for the material-fit connection of an optical element to a frame are disclosed.

Method and device for connecting an optical element to a frame

An optical element () made of a material that is transparent to wavelengths in the UV region, which optical element () includes an oleophobic coating () outside of its optically free diameter whose disperse component of the surface energy is preferably 25 mN/m or less, particularly preferably 20 mN/m or less, in particular 15 mN/m or less. In addition or as an alternative, the optical element () within its optically free diameter comprises an oleophilic coating () that is transparent to wavelengths in the UV region, with the disperse component of the surface energy of this coating preferably being more than 25 mN/m, particularly preferably more than 30 mN/m, in particular more than 40 mN/m. The optical element may be provided in an arrangement in which it dips at least partially into an organic liquid.

Optical element, projection lens and associated projection exposure apparatus

Growing community of inventors

Aalen, Germany

Gennady Fedosenko