Tokyo Electron Limited

Genki Koguchi

Yukinori Hanada

Akio Morisaki

There is provided a plasma processing method capable of carrying out a stable plasma process by way of improving plasma stabilization and also capable of increasing lifetime of a variable capacitor in a matching unit, as compared to a conventional case. The plasma processing method comprises performing a power modulation that periodically switches the high frequency power from the high frequency power supply between a first power and a second power higher than the first power, and performing a mask control that stops a matching operation of the matching unit for an application time of the first power and for a preset time after an application of the second power is started.

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Nirasaki, Japan

Genki Koguchi