Lsi Logic Corporation

Genadij V Belokopitov

Stanislav V Aleshin

Ranko L Scepanovic

Dusan Petranovic

Evgenij Egorov

An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements, obtaining a response for each of the primitive elements, and then simulating the aerial image by combining the responses over all of the primitive elements.

Geometric aerial image simulation

A mask is provided which has a complex transmission function and which includes a transparent layer and a non-transparent layer. The transparent layer has three types of phase-shifting elements, each imparting a different phase shift relative to the others, with the phase-shifting elements alternating in both x and y dimensions. The non-transparent layer has holes arranged in an approximately equally spaced grid pattern defined by common points in borders of the phase-shifting elements. Centers of at least two holes in the non-transparent layer have different offsets from their corresponding common points. Also provided is a mask blank which includes a transparent layer and a non-transparent layer. The transparent layer has three types of phase-shifting elements, each imparting a different phase shift relative to the others, with the phase-shifting elements alternating in both x and y dimensions.

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Moscow, Russia

Genadij V Belokopitov