Komag Corporation

Gen E Oshiro

Ronald Allen

Peter S Bae

Kenneth D Fukui

An end effector for loading and unloading a magnetic information storage circular disk on a grinder carrier surface includes an effector block, an annular vacuum cup, including vacuum apertures, attached to and extending from the block and a vacuum source for attaching the cup to the disk. The annular cup surrounds and abuts against a periphery of a central aperture of the disk. A disk-carrying effector further includes a series, preferably three, of spaced vacuum cups extending radially outwardly of the annular vacuum cup. The overall effector is placed into abutment with radially outward portions of the disk surface and used to reliably unload a ground disk from a grinding surface. The spaced vacuum cups compensate for any non-planarity of the disk to be picked up caused by uneven wear of the grinder surface upon which the disk rests.

End effector for unloading disks at a grinding station

A robotic end effector for loading and unloading a magnetic information storage circular disk on a grinder or polisher carrier surface includes an effector block, an annular vacuum cup, including vacuum apertures, attached to and extending from the block and a vacuum source for attaching the cup to the disk. The cup surrounds and abuts against a periphery of a central aperture of the disk. A bore in the block conveys pressurized air through the cup axial interior, through the disk central aperture to overcome surface tension (stiction) between the carrier surface or platen of the grinder or polisher and the disk underside during unloading. A disk-carrying effector is aligned by including a lens surrounded by a ring of light-emitting diodes directed to fiducial holes on the carrier surface providing for a comparative reflection of light from the diodes by dark holes and a light colored carrier surface. The lens is protected from impingement of water droplets and grinding debris by an air flow within the ring, past the lens and through a an apertured cap in the interior of the ring.

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Fremont, CA, United States of America

Gen E Oshiro