Samsung Electronics Co., Ltd.

Gee-Ill Seo

Jung-Bong Yun

Hee-Jun Kim

A charger assembly for a wafer carrying apparatus, includes a charger for conveying wafers loaded in a plurality of grooves of a boat to a subsequent manufacturing process. The charger has a plurality of wafer guiders disposed side by side and has a first gap therebetween. The charger further includes an adjusting structure by which the first gap between the plurality of guiders is aligned with a second gap formed between groove groups of the boat. A pair of supporting members are detachably attached to the wafer guiders by fasteners to allow lateral movement of the wafers guiders to ensure correct alignment of the grooves of the boat and charger.

Growing community of inventors

Kyungki-do, South Korea

Gee-Ill Seo