Liquid Air Corporation

Beneficial Machine Tools LLC

Gary Schmitt

George Benedict

Gerhard Kasper

Carl Quintino

Joe Ritrosi

A non-volatile computer readable storage medium has instructions executed by a processor to collect from a communication interface a first set of probe signals from a three dimensional axis gauge characterizing axis directions of a table. Axes directions for the table relative to a vise on the table are computed from the first set of probe signals. A second set of probe signals from electronic gauge blocks that characterize position of the table are collected from the communication interface. Actual table positions are computed from the second set of probe signals. Table position residuals between the actual table positions and desired table positions are computed. The table position residuals are conveyed to the communication interface.

Methods and devices for performing in-situ inspections during a computer assisted setup of a machine tool table

A method and system for purging an ultra-high purity gas supply manifold comprising: a process connection through which ultra-high purity gas is communicated to a process; a first pigtail conduit in selective flow communication with a high purity gas source; a second pigtail conduit in selective flow communication with said process connection; means for creating a vacuum and means for selectively placing said vacuum means in communication with said first pigtail; an ultra-high purity process gas source; a block valve assembly comprising an inlet port in flow communication with said process gas source, a first outlet port in selective communication with said purge gas supply through connection with said first pigtail and second outlet port in selective communication with said process connection through connection with said second pigtail.

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Scotts Valley, CA, United States of America

Gary Schmitt