International Business Machines Corporation

Gary R Moore

Justin W Wong

Michael W Mock

Yiheng Xu

Richard L Kleinhenz

Michael L Passow

Brian Christopher Barker

Robert A Hoth

Mark L Reath

James Allen Walters

Edward P Higgins

Horst Zisgen

Joseph Byrne

Harry D Clark

Richard C Moss

A solution for managing a manufacturing environment using operating data for each of a plurality of tools in the manufacturing environment. The operating data can include actual resource consumption data and/or actual exhaust generation data for a tool while the tool implements at least a portion of a recipe to manufacture one of a plurality of types of products manufactured in the manufacturing environment. Operation of the manufacturing environment can be configured to optimize one or more aspects of resource consumption and/or exhaust generation during the manufacture of desired quantities of the plurality of types of products within a desired time frame using the operating data.

Manufacturing management using tool operating data

Disclosed are embodiments that provide near real-time monitoring of a control application in a manufacturing environment to detect and determine the root cause of faults within the control application. The embodiments monitor the flow of data within the control application during events (i.e., transactions, stages, process steps, etc.). By comparing a dataflow path for a near real-time event with historical dataflow path records, dataflow interruptions (i.e., fails) within the control application can be detected. By determining the location of such a dataflow interruption, the root cause of the control application fail can be determined. Additionally, the invention can generate summary reports indicating the status of the control application. For example, the summary reports can quantify the performance and/or the effectiveness of the control application. These summary reports can further be generated with drill downs to provide a user with direct access to the records upon which the reports were based.

Tool for reporting the status and drill-down of a control application in an automated manufacturing environment

Disclosed are embodiments that provide near real-time monitoring of a control application in a manufacturing environment in order to detect and determine the root cause of faults within the control application. The embodiments monitor the flow of data within the control application during certain events (i.e., certain transactions, stages, process steps, etc.). By comparing a dataflow path for a near real-time event with historical dataflow path records, dataflow interruptions (i.e., fails) within the control application can be detected. By determining the location of such a dataflow interruption, the root cause of the control application fail can be determined. Additionally, the invention can generate summary reports that quantify the performance and/or the effectiveness of the control application. These summary reports can further be generated with drill downs to provide a user with direct access to the records upon which the reports were based.

Tool to report the status and drill-down of an application in an automated manufacturing environment

Method for reporting the status and drill-down of a control application in an automated manufacturing environment

A real time alarm classification system and method of use and, more particularly, to a residual gas analyzer configured to identify specific root causes of an abnormal condition such as, for example, contamination, undesirable process variability and equipment malfunction in wafer processing. The real-time alarm classification system comprises a computer infrastructure operable to: generate top contributors associated with an alarm triggered by sensed abnormal conditions; compare the top contributors to contributors of historic RGA (residual gas analyzer) alarms of known root causes that were generated by a validated model; and provide a probable root cause of the sensed abnormal conditions when a match is found between the top contributors and the contributors associated with the historic RGA alarms of known root causes. A method and computer readable medium is also contemplated to provide the processes.

Real time alarm classification and method of use

Disclosed are embodiments that provide near real-time monitoring of a control application in a manufacturing environment to detect and determine the root cause of faults within the control application. The embodiments monitor the flow of data within the control application during events (i.e., transactions, stages, process steps, etc.). By comparing a dataflow path for a near real-time event with historical dataflow path records, dataflow interruptions (i.e., fails) within the control application can be detected. By determining the location of such a dataflow interruption, the root cause of the control application fail can be determined. Additionally, the invention can generate summary reports indicating the status of the control application. These summary reports can further be generated with drill downs to provide a user with direct access to the records upon which the reports were based.

Method for reporting the status of a control application in an automated manufacturing environment

A method, apparatus and article of manufacture for implementing a relational schema comprising at least one many-to-many relationship in a hierarchical database supporting one-to-many relationships, the relational schema being defined by a plurality of entities including at least one first entity having N components and at least one second entity having M components, the first and the second entity having a many-to-many relationship. One embodiment comprises creating a bridging table to transform the many-to-many relationship between the first and the second entities into a one-to-many relationship between the first entity and the bridging table and a one-to-many relationship between the bridging table and the second entity. For each mapping between one of the N components and one of the M components, an entry is created in the bridging table, the entry comprising a mapping between the one of the N components and the one of the M components.

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Milton, VT, United States of America

Gary R Moore