Thomas West, Inc.

Gary Quigley

Thomas E West

Peter McKeever

Pepito Galvez

Suli Holani

Long Van Nguyen

Kevin H Song

Matt Richardson

Koli Holani

Jorge Craik

A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.

Method and systems to control optical transmissivity of a polish pad material

A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.

Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads

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Loomis, CA, United States of America

Gary Quigley