Applied Precision, Inc.

Rudolph Technologies, Inc.

Other

Gary Mark Gunderson

Greg Olmstead

John P Stewart

John D Locatelli

Thurmond R Smith

The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.

Inspection device with vertically moveable assembly

A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.

System and method of planar positioning

A Z-axis stage for use in, e.g., an orthogonal motion microscope stage, includes a carrier plate, an actuator plate, and a base. Three or more upper camming elements with downwardly directed camming surfaces are mounted to the underside of the carrier plate using a semi-kinematic mounting technique. Three or more lower camming elements with upwardly directed camming surfaces are mounted to the top surface of the base using a semi-kinematic mounting technique. The actuator plate includes apertures to accommodate the lower camming elements and the upper and lower camming surfaces of adjacent camming elements are mated. Linear slides are interposed between the mated camming surfaces and the lower camming elements and the base. Movement of the actuator plate in an X-Y reference plane translates into movement of the carrier plate along the Z-axis (i.e., the optical axis) in response to the relative, sliding motion of the mated camming elements.

Z-axis frame for a high accuracy orthogonal motion stage

A high accuracy, orthogonal motion stage for microscopes and the like uses three frames for orthogonal motion. The lower most frame has provided thereon a series of downwardly depending ramps. An actuator plate having correspondingly positioned, upwardly directed ramps is translated with respect to the lower most frame to raise and lower the frames.

Orthogonal high accuracy microscope stage

An expanding file box includes a flat bottom panel and a pair of hollow side walls extending upwardly from each side of the bottom panel. The side walls have front and rear entrance openings leading into the interior thereof. The file box also includes flat front and rear panels connected to the front and rear edges, respectively, of the bottom panel to each pivot between a closed substantially vertical position and an open, outwardly tilted position. With the front and rear panels in open position, files or cards located within the box can be tilted relative to each other so that substantially the entire front face of the file is visible. The front panel includes a front sliding panel extending rearwardly from each side edge portion of the front panel to slidably extend into the hollow interior of a corresponding side wall to pivot with the front panel to form an extension of the side walls when the front panel is tilted in open position. Likewise, the rear panel includes rear sliding panels extending forwardly from each side edge of the rear panel to slidably extend into the hollow interior of a corresponding side wall to pivot with the rear panel to form a rear extension of the side walls when the rear panel is tilted rearwardly in open position.

Growing community of inventors

Issaquah, WA, United States of America

Gary Mark Gunderson