3m Innovative Properties Company

Minnesota Mining and Manufacturing Company

Gary M Palmgren

Brian D Goers

Phillip E Tuma

Jay B Preston

Douglas J Pysher

Negus B Adefris

Daniel B Pendergrass, Jr

Todd J Christianson

Naum N Tselesin

William D Joseph

Vincent J Laraia

Stephen C Loper

Soon C Park

Christopher N Loesch

Andrew H Behr

Ashu N Mujumdar

Louis R Carpentier

Robert T Cesena

Troy W Heuermann

Polishing pads containing a phase-separated polymer blend, and methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pads include a multiplicity of polishing elements integrally formed in a sheet. In another exemplary embodiment, the polishing elements are bonded to a support layer, for example by thermal bonding. In certain embodiments, the polishing pad may additionally include a compliant layer affixed to the support layer, and optionally, a polishing composition distribution layer.

Polishing pads including phase-separated polymer blend and method of making and using the same

A method of making an abrasive particle distribution includes: sorting an initial lot of abrasive particles into a plurality of sublots including first and second sublots of the abrasive particles according to their average particle diameter and aspect ratio, and combining the first and second sublots. The initial lot conforms to an abrasives industry specified nominal grade. The first sublot has an average particle diameter and aspect ratio less than the second sublot. A sum of the first sublot and the second sublot contains fewer abrasive particles than the initial lot. The resultant abrasive particle distribution and abrasive articles including the same are also disclosed.

Method of sorting abrasive particles, abrasive particle distributions, and abrasive articles including the same

Provided is an abrasive article comprising (a) a metallic foil having a first and second surfaces and voids therebetween, (b) a plurality of abrasive particles substantially in the voids, and (c) an alloy at least partially between the abrasive particles and the foil in the voids, wherein the alloy comprises a second component and a portion of the metallic foil near the voids. Also provided are methods of making and using such abrasive articles.

Extended life abrasive article and method

The disclosure relates to abrasive articles useful in chemical-mechanical polishing (CMP), the articles including a substrate with opposite major surfaces, an abrasive material overlaying at least a portion of at least one of the major surfaces, and at least one of a radio frequency identification (RFID) tag, a RFID tag reader, or a sensor for providing CMP information to a transmitter positioned near the substrate, the transmitter positioned near the substrate and adapted to wirelessly receive CMP information and wirelessly transmit the CMP information to a remote receiver. The disclosure also relates to a CMP pad conditioner for wirelessly communicating CMP information to a remote receiver, a CMP process monitoring system for wirelessly communicating CMP information to a remote receiver, and a method for conditioning a CMP pad using a CMP process monitoring system for wireless communicating CMP information to a remote receiver.

Abrasive articles, CMP monitoring system and method

Thermal transfer coating comprising a plurality of metal bodies and a plurality of interstitial elements disposed between and connecting the plurality of metal bodies to one another. The metal bodies comprise an inner portion comprising a first metal and an outer portion comprising an alloy comprising the first metal and a second metal. The interstitial elements comprise the alloy of the outer portion.

Thermal transfer coating

Provided are an abrasive tool comprising abrasive particles having an average shape controlled to within a small range, and methods of providing such tools. Thus, a large number of abrasive tools will have very similar operating characteristics, and abrasive tools made at different times or through different methods also can have very similar operating characteristics.

Shape controlled abrasive article and method

Structured thermal transfer article comprising a plurality of metal bodies and a plurality of interstitial elements disposed between and connecting the plurality of metal bodies to one another. The metal bodies comprise an inner portion comprising a first metal and an outer portion comprising an alloy comprising the first metal and a second metal. The interstitial elements comprise the alloy of the outer portion.

Structured thermal transfer article

A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.

Insulated pad conditioner and method of using same

The invention provides an abrasive article, and methods for the use and the manufacture of the article. The abrasive article comprises an abrasive surface; and a performance index associated with the abrasive article, the index indicating an aspect of the abrasive performance of the article. In abrasive applications, the performance index is used to determine initial process conditions under which the abrasive article will abrade a workpiece. A process for making the abrasive article comprises (a) providing an abrasive article having an abrasive surface; (b) providing a workpiece having an abradable surface thereon; (c) abrading the abradable surface by applying the abrasive surface against the abradable surface at a known applied pressure and velocity and relatively moving the abrasive article and the abradable surface during a predetermined period of time; (d) devising a performance index based on the abrasive performance of the abrasive article during the abrading step (c); and (e) associating the performance index with the abrasive article.

Abrasive articles and methods for the manufacture and use of same

In general, techniques are described that allow an abrasive manufacturing process to achieve a controlled performance parameter, e.g., an amount of material removal, without requiring the use of feedback controls within the abrasive manufacturing process. For example, a system includes a machine to abrade a workpiece with an abrasive article, and a controller to control the application of the abrasive article to the workpiece by the machine to achieve a substantially constant cut rate for the abrasive article. The controller controls one or more process variables in accordance with an open-loop mathematical model that relates the cut rate of the abrasive article to an application force of the abrasive article to achieve controlled material removal. For example, a constant rate of cut can be achieved or a fixed amount of material can be removed while abrading one or more workpiece in accordance with the model.

Modeling an abrasive process to achieve controlled material removal

A pad conditioner having an abrasive disk and an undulating disk and methods for using the same. The undulating disk has at least one raised portion and at least one recessed portion. The abrasive disk is releasably affixed to at least a portion of the recessed portion to form an undulated abrasive surface. The undulating disk allows the pad conditioner to be modified for use with multiple processes and for a variety of workpieces.

Undulated pad conditioner and method of using same

The present invention comprises a method of manufacturing a brazed body. The method comprises forming a multi-layer assembly comprising: a first material capable of forming a first oxide and having a melting temperature higher than 660&#xb0; C.; a first reducing metal adjacent the first material, the reducing metal capable of reducing at least a portion of the first oxide on the first material a braze adjacent to the reducing metal; and a second material adjacent the braze, the second material comprising a material having a melting temperature higher than 660&#xb0; C. The method then comprises creating a vacuum around the assembly, and heating the assembly to melt the reducing metal and the braze. The assembly is then subject to cooling to thereby form the brazed body.

Reducing metals as a brazing flux

A method for the manufacture of a brazed body including forming a multi-layer assembly having: a first material capable of forming a first oxide and having a melting temperature higher than 660&deg; C.; a first reducing metal adjacent the first material, the reducing metal capable of reducing at least a portion of the first oxide on the first material a braze adjacent to the reducing metal; and a second material adjacent the braze, the second material being a material having a melting temperature higher than 660&deg; C. The method then includes creating a vacuum around the assembly, and heating the assembly to melt the reducing metal and the braze. The assembly is then subject to cooling to thereby form the brazed body.

Growing community of inventors

Lake Elmo, MN, United States of America

Gary M Palmgren