Empak, Inc.

Other

Gary M Gallagher

Barry Lee Gregerson

Brian Wiseman

Boyd C Wittman

James E Holliday

Kelly Peterson

Edmund B Neumann

Brian S Wiseman

Shipping and transport cassette with kinematic coupling

300 mm microenvironment pod with door on side

An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.

Enclosed sealable purgible semiconductor wafer holder

Combination shipping and transport cassette

Semiconductor wafer cassette transport box

150 mm wafer cassette for use on 200 mm semi standard wafer handling

A semi-conductor transport container is described, which includes a box, a door and an actuated rotary retainer attached to the sidewall of the box to thereby prevent movement of the wafers within a wafer cassette during transportation and storage. The rotary retainer includes flexible fingers that apply a slight force against the wafers when the box is engaged with the box. The rotary retainer is simple, requires less moving parts, and rotates automatically, completely away from the wafers when the box is disengaged from the door. Also, the box seals with the door, when engaged with a door, thereby creating a particle free storage area.

Actuated rotary retainer for silicone wafer box

Growing community of inventors

Colorado Springs, CO, United States of America

Gary M Gallagher