Beijing Voyager Technology Co., Ltd.

Gary Li

Youmin Wang

Yufeng Wang

Qin Zhou

Kong Yin Ho

Sergio Fabian Almeida Loya

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprises: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror; and an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror around a rotation axis to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.

Mirror assembly for light steering

Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a scanning mirror independently rotatable around a first axis and a second axis. In certain other configurations, the scanner may also include a first driver configured to drive the scanning mirror to rotate around the first axis. In still other configurations, the scanner may further include a second driver configured to drive the scanning mirror to simultaneously rotate around the second axis. In certain aspects, the first driver and the second driver may be different types of drivers.

System and method for driving a two-axis scanning mirror using drivers of different types

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis. The second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and looped torsion springs

In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

Mirror assembly for light steering with reduced finger thickness

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

Mirror assembly for light steering with flexible support structure

A method for designing an optical scanning mirror is provided. The method may include receiving, by a communication interface, a set of design parameters of the scanning mirror. The method may also include simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model. In certain aspects, the computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force. The method may further include generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror. The mirror oscillation data may include a correlation of drive frequency, angular displacement, and time.

System and method for designing MEMS mirror based on computed oscillation frequency

A Light Detection and Ranging (LiDAR) module for a vehicle can include a semiconductor integrated circuit with a microelectromechanical system (MEMS) and a substrate, the MEMS comprising a micro-mirror assembly including a mirror and a gimbal structure. The gimbal can be configured concentrically around and coplanar with the mirror. When rotated, the gimbal drives the mirror to oscillate at or near a resonant frequency and is coupled to the mirror via mirror-gimbal connectors. A support structure can be coupled to a backside of the mirror and gimbal structures and can increase the stiffness of the mirror to help the mirror better resist dynamic deformation. To limit the added rotational moment of inertia, the support structure can be etched to form a matrix of cells (e.g., formed by a mesh of circumferential and radial ridges) such that up to approximately 90% of the support structure material forming the support structure is removed.

MEMS mirror structure with backside skeleton

Embodiments of the disclosure provide a scanning mirror assembly for an optical sensing system. The scanning mirror assembly may include a scanning mirror configured to rotate around an axis of rotation. The scanning mirror assembly may further include a plurality of torsion springs coupled to at least one side of the scanning mirror along the axis of rotation. In certain aspects, the plurality of torsion springs may collectively have a non-linear spring constant and a linear spring constant. In certain other aspects, a ratio of the non-linear spring constant over the linear spring constant may meet a predetermined threshold.

Scanning mirror assembly with torsion springs designed to improve non-linearity

Embodiments of the disclosure provide a design method for a LiDAR scanning mirror. The design method may include receiving, by a communication interface, design parameters of the LiDAR scanning mirror. The design method may further include setting, by at least one processor, an initial value and a step size for each design parameter. The design method may also include adjusting the design parameters according to the respective step sizes. The design method may additionally include computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the adjusted design parameters. The design method may further include determining that the mirror performance indexes meet a predetermined target performance. The design method may also include providing, by the at least one processor, the adjusted design parameters and the mirror performance indexes for making the LiDAR scanning mirror.

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Mountain View, CA, United States of America

Gary Li