At&t Bell Laboratories

Bell Telephone Laboratories

At&t Technologies, Inc.

Gary L Wolk

Michal Edith Gross

Georgia J Fisanick

William R Holland

Hung C Ling

Abraham Katzir

Heidi M Gordon

Donald K Atwood

A process of radiation-induced formation of a uniform metal or metal oxide region suitable for device application or for repairing transparent defects in pattern metal films of lithographic masks has been found. The process requires that the heat evolved during the radiation-induced reactions be carefully limited to produce the desired uniformity.

Method of forming metal regions

An optical waveguide circuit including a nonlinear optical device comprises a metal ground plane (21), a polymer core layer (25) in which optical waves are propagated, and polymer clad layers (22 and 26) on opposite sides of the core layer. The waveguide paths are defined by troughs (23) in one of the clad layers. The nonlinear device is made by electrooptically poling part of the core layer which contains a nonlinear moiety. The clad layers (26 and 22) have a significantly higher conductivity than that of the core layer (25) which improves the efficiency of the electrooptic poling.

Nonlinear optical devices and methods

A process of laser-induced metal deposition for repairing transparent defects (18) in patterned metal films (14) of photomasks (10). The process comprises the steps of (a) coating the surface (16) of the substrate (12) having the film (14) thereon with a layer of metal-organic compound (50); (b) exposing the portions of the layer of metal-organic compound (50) overlying the defects (18) to a beam (24) of electromagnetic radiation from a laser (22); (c) ramping the power level of the radiation beam (24) delivered by the laser (22) until a metal patch (52) is reflective and adherent is formed; and (d) removing the unexposed portions of metal-organic compound (50) remaining on the substrate surface (16).

Method of repairing a defective photomask

Growing community of inventors

West Trenton, NJ, United States of America

Gary L Wolk