Stc, Inc

Itt Industries, Inc.

Standard Telephones & Cables Limited

Gary J Tomkins

Peter D Scovell

Peter F Blomley

Roger L Baker

Paul J Rosser

A fully self-aligned polycrystalline silicon emitter bipolar transistor. Self-alignment of the p.sup.+ base contact (12) is achieved by using oxidized sidewalls (8) (sidewall spacers) of the emitter mesa (7) as part of the p.sup.+ base contact implantation mask. Collector contact (13) alignment can be achieved using oxidized sidewalls (17) of polycrystalline silicon alignment mesas (14) defined in the same polysilicon as the emitter mesa (7) but deposited on oxide (2) rather than the implanted base region (5).

Method of manufacturing a bipolar transistor

A fully self-aligned polycrystalline silicon emitter bipolar transistor. Self-alignment of the p.sup.+ base contact (12) is achieved by using oxidised sidewalls (8) (sidewall spacers) of the emitter mesa (7) as part of the p.sup.+ base contact implantation mask. Collector contact (13) alignment can be achieved using oxidised sidewalls (17) of polycrystalline silicon alignment mesas (14) defined in the same polysilicon as the emitter mesa (7) but deposited on oxide (2) rather than the implanted base region (5).

Semiconductor devices

In order to prevent diffusion of silicon from under a titanium disilicide interconnect (1) and into an overlying aluminium layer (6), the disilicide is selectively nitrided by annealing in nitrogen at the points where interconnection between the disilicide and aluminium is required via holes (4) in a silicon dioxide layer (3). The titanium nitrode contacts (5) thus formed in a truly self-aligned manner provide a good barrier to silicon diffusion while having an acceptable low resistivity.

Process of self aligned nitridation of TiSi.sub.2 to form TiN/TiSi.sub.2

Method of making a self-aligned bipolar transistor with composite masking

Polysilicon elements of integrated circuits, for example gates (24) or interconnects, are provided with metallic silicide layers (26) in order to take advantage of the lower resistivity thereof. The polysilicon elements are defined on an oxide layer (23) disposed on a silicon substrate (20) before polysilicon metallization. After polysilicon metallization the metal and polysilicon are caused to interdiffuse to form silicide layers (26) covering the polysilicon elements (24).

Manufacture of MOSFET with metal silicide contact

A metallic silicide layer is formed on a substrate by pulse heating, in an inert atmosphere, metal and silicon deposited on the substrate to a temperature and for a time sufficient to cause interdiffusion of the metal and silicon.

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Maidstone, United Kingdom

Gary J Tomkins