Brooks Instrument, LLC

Brooks Instruments, LLC

Gary Francis Conner

Jay J Mendelson

Christopher A Mazza

Edward T Fisher

Al Schultz

Scott Amsbaugh

Chris Mazza

A method is disclosed for determining leakby in a flow controller () comprising a flow sensor (), a flow control valve () and electronics (). The electronics are coupled to the flow sensor, the flow control valve and configured to adjust the flow control valve in response to the signal of the flow sensor indicating the flow rate of the material such that a set flow rate of material through the flow controller is maintained. The steps of the method comprise determining () a zero drift (Qdrift) value for the flow sensor (). Determining () a flow rate (Qflow) through the flow controller () when the control valve () is in the fully closed position. And determining () the leakby through the flow controller () where the leakby is equal Qflow-Qdrift.

Valve leakby diagnostics

A system and method for compensating for thermal drift. A temperature is measured in a meter as a temperature voltage. The temperature voltage is converted to a digital signal. The digital signal is processed to generate an offset voltage in response to the digital signal. The offset voltage is applied as an input to an amplifier. The amplifier receives as a second input a gauge voltage. An output is generated from the meter that corrects the gauge voltage using the offset voltage to compensate for thermal drift.

System and method for sensor thermal drift offset compensation

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Harleysville, PA, United States of America

Gary Francis Conner