Modern Electron, Inc.

Gary D Foley

Tony S Pan

Max Nathan Mankin

Andrew T Koch

Andrew R Lingley

Chloe A M Fabien

Yong Sun

William Kokonaski

Stephen E Clark

Arvind Kannan

Jason M Parker

Hsin-I Lu

Peter J Scherpelz

Chuteng Zhou

Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.

Suspended grid structures for electrodes in vacuum electronics

Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.

Shadowed grid structures for electrodes in vacuum electronics

Growing community of inventors

Mill Creek, WA, United States of America

Gary D Foley