Tel Nexx, Inc.

Matec Instrument Companies, Inc.

Gary Boulet

Arthur Keigler

Daniel Goodman

Terry Lee McElroy

Tonis Oja

J Gabriel DosRamos

Robert W Reed

A substrate edge bevel etch module for etching a material from a peripheral edge of a substrate with an etchant is described. The substrate edge bevel etch module includes a rotatable substrate holder having a support for a substrate, and a surface tension etch applicator comprising a wetted etching surface opposing a substrate surface proximate an edge of the substrate when the surface tension etch applicator is located proximate to the edge of the substrate. The surface tension etch applicator further includes an etchant dispensing portion, proximate the wetted etching surface, which dispenses an etchant in a region between the wetted etching surface and the substrate surface and wet at least a portion of the wetted etching surface and the substrate surface. A spacing between the wetted etching surface and the substrate surface is selected to retain the etchant using surface tension forces and form a meniscus there between.

Edge bevel removal apparatus and method

A device for use in determining the characteristics of particles dispersed in a medium is described. The device has a sample cell for holding a sample containing particles dispersed in a medium. A transducer is positioned to emit sound waves into the sample of the sample cell. A mirror surface is positioned for translational movement within the sample cell without changing the level of the sample in the cell, for movement without the use of dynamic o-ring seals, and is positioned to reflect sound waves emitted by the transducer.

Device for use in determining characteristics of particles dispersed in a medium, and method therefor

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Rindge, NH, United States of America

Gary Boulet