Kla Tencor Corporation

Other

Kla Corporation

Garry Allen Rose

Gildardo Rios Delgado

Joseph Walsh

William G Schultz

Bart Petterson

Michael Cherrington

James Cherrington

H Steven Larson

Eduardo Soto

Damon Floyd Kvamme

Daniel R Hennigan

Ali R Ehsani

I-Fan Wu

Bernd Burfeindt

Christopher Davis

Joseph Armstrong

Kent McKernan

David Jalil Zare

Orlando Threet

Sarbjit Singh Grewal

Frank Barkusky

An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

Vapor as a protectant and lifetime extender in optical systems

An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.

System and method for providing a clean environment in an electron-optical system

A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.

Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture

A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

Method and system for imaging of a photomask through a pellicle

An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.

Apparatus and method for cross-flow purge for optical components in a chamber

An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

High purity ozone generator for optics cleaning and recovery

A duct device for insulated delivery of temperature controlled air. The device comprises an elongated, tubular member configured as a conduit for delivery of air and having a tubular wall fabricated of non-load-bearing insulative material. This insulated material includes at least one continuous gap formed into the tubular wall and extending along the tubular member. This gap is filled with a rigid binder which bonds to the insulative material and is capable of reinforcing the structural strength of the tubular member. This binder filled gap operates as a strut, which may be positioned longitudinally along the tubular member, or in other patterns such as a helical configuration. Reinforcing structure is also disclosed for the end sections of the tubular member, along with interconnecting structure.

Ductwork for delivery of low temperature air

A ceiling vent diffuses air from a heating or cooling system in a laminar flow into a room for optimum dispersion in the room. Inlet air strikes a hinged vane within the vent. The vane deflects the air in a narrowing air way along a continuous concave curvature and extending all the way to the outlet opening of the vent. The vane responds to the force of air flow to narrow or enlarge the air way and, thus, regulate the velocity of air exiting the vent. A curved air catch associated with the vane directs the outflow of air and also laterally disperses air within the vent. The vent maintains a relatively constant velocity and diffusion of air into a room despite variable flow rates from the source of air.

Ceiling vent with movable vane

Growing community of inventors

Livermore, CA, United States of America

Garry Allen Rose