Fujian Jinhua Integrated Circuit Co., Ltd.

Gang-Yi Lin

Yu-Cheng Tung

Yifei Yan

Yi-Wang Jhan

Xiaopei Fang

An-Chi Liu

Fu-Che Lee

Congcong Wang

A semiconductor structure includes a substrate, a first dielectric layer on the substrate, a second dielectric layer on the first dielectric layer, and an interconnection structure on the second dielectric layer. The interconnection structure includes at least two lateral extending portions on the second dielectric layer, and a U-shaped portion through the second dielectric layer and a portion of the first dielectric layer and connected between adjacent ends of the two lateral extending portions.

Semiconductor structure and method for forming the same

A semiconductor structure including a substrate, a first dielectric layer disposed on the substrate, a second dielectric layer disposed on the first dielectric layer and in physical contact with the first dielectric layer, an opening on the substrate and having a lower portion through the first dielectric layer and an upper portion through the second dielectric layer, an conductive layer disposed on the second dielectric layer at two sides of the opening and in physical contact with the second dielectric layer, a contact structure disposed in the lower portion of the opening, and a passivation layer covering a top surface of the contact structure, a sidewall of the second dielectric layer, and a sidewall of the conductive layer.

A method for fabricating a semiconductor structure includes the following steps. Decomposing a layout to first connection patterns and second connection patterns alternatively arranged with each other, where a to-be-split pattern is disposed between the first connection pattern and the second connection pattern; splitting the to-be-split pattern into a cutting portion and a counterpart cutting portion; forming a first photomask having a layout constructed by the first connection pattern and the cutting portion; forming a second photomask having a layout constructed by the second connection pattern and the counterpart cutting portion; transferring layouts of the first and second photomasks to a target layer to form connection patterns and a merged pattern, where the contour of the merged pattern is defined by the cutting portion and the counterpart cutting portion, and each end surface of the merged pattern comprises a recessed region and a protruded region.

Semiconductor structure, method for fabricating thereof, and method for fabricating semiconductor layout

A semiconductor structure, including a plurality of connection patterns disposed on the substrate, and a merged pattern disposed between adjacent two of the connection patterns, wherein the merged pattern includes a first outer line, a central line and a second outer line sequentially arranged along a first direction and connected with each other, and an end surface of the first outer line, an end surface of the central line and an end surface of the second outer line are misaligned along the first direction.

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Quanzhou, China

Gang-Yi Lin