Leybold Vakuum Gmbh

G&uuml;nter Sch&uuml;tz

Christian Beyer

Ralf Adamietz

Dieter Haas

A friction pump ( ), such as turbomolecular pump, includes a steel housing ( ) in which a steel shaft ( ) is supported by a bearing ( ). A rotor ( ) with a central bore ( ) is mounted on the shaft. In order to reduce the risk of the joint area between the rotor and the shaft becoming loose, a ring groove ( ) which encompasses the joint area between the rotor is provided in an area adjacent at least one of the faces of the rotor. A reinforcing ring ( ) of a high strength, low thermal expansion material encompasses one of a thrust member ( ) and cylindrical rotor sections ( ) adjacent the shaft.

Rotor fixture for a friction vacuum pump

A friction vacuum pump ( ) with a frame ( ), stator ( ), rotor ( ) and housing; all functional elements of the pump are combined into one unit ( ), which, in turn, can be inserted into a housing ( ) that has been adapted to a specific application; using this procedure, all separate connection housing can be eliminated and optimal conductance can be achieved (FIG. 1).

Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump

The invention relates to a friction vacuum pump ( ) containing at least one turbomolecular pump stage ( ), a screw pump stage ( ) connected to the delivery side of the pump, and a filling stage ( ) arranged between the turbomolecular pump stage ( ) and the screw pump stage ( ). According to the invention it is proposed that said filling stage ( ) be configured as a centrifugal stage in order to simplify the construction thereof.

Growing community of inventors

Kö'ln, Germany

Günter Schütz

Growing community of inventors

Kö'ln, Germany

G&uuml;nter Sch&uuml;tz

Günter Schütz