Leybold Systems Gmbh

Unaxis Deutschland Holding Gmbh

G&uuml;nter Br&auml;uer

Joachim Szczyrbowski

Harro Hagedorn

Hans-Georg Lotz

Hermann Kloberdanz

Michael K&ouml;nig

G&ouml;tz Teschner

Alfons Z&ouml;ller

Jochen Schneider

J&uuml;rgen Meinel

A process is provided for sputter-induced precipitation of metal oxide layers on substrates by means of a reactive sputter process. The plasma charge acting upon the target to be evaporated is provided with electric power selected such that the metal oxide layers precipitated on the substrates to be coated are deposited at a precipitation rate of &gE;4 nm/s. During the coating process the substrate to be coated is arranged stationary in relation to the target material to be evaporated. The electrodes are connected in a conductive manner to the outputs of an alternating current source whereby the alternating frequency of the alternating current provided for the electrical supply of the plasma discharge is selected between 10 kHz and 80 kHz. Particularly preferred is that the precipitated oxide layer is a TiO layer or an SiO layer.

Interference layer system

In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (,) and with a loading and an unloading station (,or,), two vacuum chambers (,) are provided with several coating stations (,or,to,), directly next to one another, wherein a rotatable transport arm (,or,) is accommodated in each of the two chambers (,), and the transport planes of the two transport arms (,) are aligned with one another. In the separation area of the two chambers (,), an air lock is provided with a corresponding transfer apparatus (,) with two transport arms (,), whose rotary plate (,) is provided with substrate storage unit (,) and projects about halfway into one chamber (,) and halfway into the other chamber (,), wherein one chamber (,) has both the loading as well as the unloading station (,or,).

Apparatus for the coating of substrates in a vacuum chamber

Growing community of inventors

Freigericht, Germany

Günter Bräuer

Growing community of inventors

Freigericht, Germany

G&uuml;nter Br&auml;uer

Günter Bräuer